High speed fabrication of aluminum nanostructures with 10 nm spatial resolution by electrochemical replication

Biring, Sajal; Tsai, Kun-Tong; Sur, Ujjal Kumar; Wang, Yuh‐Lin

doi:10.1088/0957-4484/19/35/355302

Cited by 8 publications

(4 citation statements)

References 13 publications

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“…Porous anodic alumina (PAA) has received considerable attention because it can be used as a template for nanofabrication [1][2][3]. The formation mechanism of PAA had been studied over five decades and extensive research has made great achievements in recent years [4][5][6][7][8][9][10][11][12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Electronic currents and the formation of nanopores in porous anodic alumina

Zhu¹,

Song²,

Liu³

et al. 2009

Nanotechnology

134

280

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The formation processes of barrier anodic alumina (BAA) and porous anodic alumina (PAA) are discussed in detail. The anodizing current J(T) within the oxide includes ionic current j(ion) and electronic current j(e) during the anodizing process. The j(ion) is used to form an oxide and the j(e) is used to give rise to oxygen gas or sparking. The j(e) results from the impurity centers within the oxide. For a given electrolyte, the j(e) is dependent on the impurity centers and independent of the J(T). The formation of nanopores can be ascribed to the oxygen evolution within the oxide. Oxygen gas will begin to be released at the critical thickness d(c). The manner of the development of PAA is in accordance with that of BAA. The differences between PAA and BAA are the magnitude of j(e) or the continuity of oxygen evolution. There are two competitive reactions, i.e. oxide growth (2Al3 + 3O2- --> Al2O3) and oxygen evolution (2O2- --> O2 up arrow + 4e). The former keeps the wall of the channel lengthened, the latter keeps the channel open. By controlling the release rate of oxygen gas under different pressures, the shape of the channels can be adjusted. The present results may open up some opportunities for fabricating special templates.

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Section: Introductionmentioning

confidence: 99%

Electronic currents and the formation of nanopores in porous anodic alumina

Zhu¹,

Song²,

Liu³

et al. 2009

Nanotechnology

134

280

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“…Other than the two-step anodization method, pre-pattern methods [30][31][32][33] can also be employed to achieve extremely narrow distributions on lattice spacing, pore size and thickness of the barrier layer. With the help of the fabulous uniformity of the template fabricated by pre-pattern methods for the following electroplating process, the reduction of missing nanowires and the precise control of the nanocomposite in the anisotropic metamaterials are then possibly obtained.…”

Section: Indefinite Metamaterials Fabricationmentioning

confidence: 99%

Design, fabrication and characterization of indefinite metamaterials of nanowires

Yao

Wang

Tsai

et al. 2011

Phil. Trans. R. Soc. A.

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Indefinite optical properties, which are typically characterized by hyperbolic dispersion relations, have not been observed in naturally occurring materials, but can be realized through a metamaterial approach. We present here the design, fabrication and characterization of nanowire metamaterials with indefinite permittivity, in which allangle negative refraction of light is observed. The bottom-up fabrication technique, which applies electrochemical plating of nanowires in porous alumina template, is developed and demonstrated in achieving uniform hyperbolic optical properties at a large scale. We developed techniques to improve the uniformity and to reduce the defect density in the sample. The non-magnetic design and the off-resonance operation of the nanowire metamaterials significantly reduce the energy loss of electromagnetic waves and make the broad-band negative refraction of light possible.

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“…To further broaden the applications of AAO templates for the fabrication of nanocomposites with more stringent precision in their physical properties, many attempts have been made to control the initial position and pore configuration of the nanochannels formed on AAO templates as a means of enriching the variety of pattern configurations. In this effort, lithographic guiding methods have been used; these includenanoimprint lithography [20,21], three-beam interference lithography [22], focued ion beam (FIB) lithography [23][24][25][26], and template molding [27]. Pulse anodization has also been used [28,29].…”

Section: Introductionmentioning

confidence: 99%

Custom-designed arrays of anodic alumina nanochannels with individually tunable pore sizes

Tsai¹,

Liu²,

Wang³

et al. 2014

Nanotechnology

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We demonstrate a process to selectively tune the pore size of an individual nanochannel in an array of high-aspect-ratio anodic aluminum oxide (AAO) nanochannels in which the pore sizes were originally uniform. This novel process enables us to fabricate arrays of AAO nanochannels of variable sizes arranged in any custom-designed geometry. The process is based on our ability to selectively close an individual nanochannel in an array by using focused ion beam (FIB) sputtering, which leads to redeposition of the sputtered material and closure of the nanochannel with a capping layer of a thickness depending on the energy of the FIB. When such a partially capped array is etched in acid, the capping layers are dissolved after different time delays due to their different thicknesses, which results in differences in the time required for the following pore-widening etching processes and therefore creates an array of nanochannels with variable pore sizes. The ability to fabricate such AAO templates with high-aspect-ratio nanochannels of tunable sizes arranged in a custom-designed geometry paves the way for the creation of nanophotonic and nanoelectronic devices.

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High speed fabrication of aluminum nanostructures with 10 nm spatial resolution by electrochemical replication

Cited by 8 publications

References 13 publications

Electronic currents and the formation of nanopores in porous anodic alumina

Electronic currents and the formation of nanopores in porous anodic alumina

Design, fabrication and characterization of indefinite metamaterials of nanowires

Custom-designed arrays of anodic alumina nanochannels with individually tunable pore sizes

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