2014
DOI: 10.1088/0957-4484/25/33/335301
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Custom-designed arrays of anodic alumina nanochannels with individually tunable pore sizes

Abstract: We demonstrate a process to selectively tune the pore size of an individual nanochannel in an array of high-aspect-ratio anodic aluminum oxide (AAO) nanochannels in which the pore sizes were originally uniform. This novel process enables us to fabricate arrays of AAO nanochannels of variable sizes arranged in any custom-designed geometry. The process is based on our ability to selectively close an individual nanochannel in an array by using focused ion beam (FIB) sputtering, which leads to redeposition of the … Show more

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Cited by 5 publications
(8 citation statements)
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“…Figure 2. Multiscale AAO nanochannel templates for linearly joint nanomaterials.A two-step anodization process produced hexagonal close packed pore arrays that have pore to pore distance of 100 nm under 40 V with 0.3 M oxalic acid at 8 °C 24,26. After the formation of well-ordered pores of AAO film, a pore widening procedure was followed to control the pore-size as a function of etching time with phosphoric acid.…”
mentioning
confidence: 99%
“…Figure 2. Multiscale AAO nanochannel templates for linearly joint nanomaterials.A two-step anodization process produced hexagonal close packed pore arrays that have pore to pore distance of 100 nm under 40 V with 0.3 M oxalic acid at 8 °C 24,26. After the formation of well-ordered pores of AAO film, a pore widening procedure was followed to control the pore-size as a function of etching time with phosphoric acid.…”
mentioning
confidence: 99%
“…FIB direct‐write lithography has the advantage of the convenience of varying patterned structures because it can precisely control the irradiation positions, beam energy, and ion dose. Such an advantage has been exploited to create various AAO films with nanochannels arranged in novel geometry and will be discussed later …”
Section: Development Toward Creation Of Guided Anodic Alumina Nanochamentioning
confidence: 99%
“…The technique of FIB selected‐area closing–reopening of AAO nanochannels has been further applied to fabricate anodic alumina nanochannels with individually tunable pore sizes, as shown in Figure . Similar to the channel‐closing process, FIB bombardment was used to create a thin capping layer partially covering the surface of a guided AAO, as shown in Figure d.…”
Section: Structure Modification Of Guided Aao Nanochannelsmentioning
confidence: 99%
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“…[6][7][8][9] Anodic aluminum oxide formed by anodizing has typically been classified into two different groups with distinct nanomorphology characteristics: barrier and porous oxides. 10,11 An anodic barrier oxide can be obtained by anodizing in neutral solutions, and it possesses a thin, compact amorphous layer.…”
mentioning
confidence: 99%