High-speed and precision control of a piezoelectric positioner with hysteresis, resonance and disturbance compensation

Wang, Geng; Chen, Guoqiang; Bai, Fuzhong

doi:10.1007/s00542-015-2638-9

Cited by 20 publications

(9 citation statements)

References 38 publications

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“…The desired tracking performance of the consid- ered piezo-actuated positioning stage has been well achieved with the presented control scheme. The achieved real-time tracking performance in this paper is now compared with some other combined feedforwardfeedback control schemes presented in the literature [13], [28], [48]- [55]. A comparative study has been performed with those papers in the literature having real-time experimental results with similar tracking frequencies as presented in this paper.…”

Section: B Tracking Error Analysismentioning

confidence: 87%

Robust μ-Synthesis With Dahl Model Based Feedforward Compensator Design for Piezo-Actuated Micropositioning Stage

Ahmad

Ali

2020

IEEE Access

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In this paper, a combined feedback-feedforward control design scheme is presented to enhance the tracking performance of a piezo-actuated micropositioning stage by compensating the nonlinear hysteretic behavior of the piezoelectric actuator and model uncertainties of the system. Detailed investigation of the presented control scheme is performed not only in simulation by analyzing the robust stability and robust performance but also in real-time with motion trajectories of multiple frequencies. To design the presented control scheme, first of all, the dynamic model of the system is identified from the real-time experimental data by using the recursive least squares parameter adaptation algorithm. Then, Dahl hysteresis model is considered to represent the nonlinear hysteretic behavior of the piezoelectric actuator. To deal with this hysteresis nonlinearity, Dahl feedforward compensator is designed without involving inverse model calculations to avoid any computational complexity. This feedforward compensator is then combined with µ-synthesis robust feedback controller which is designed in the presence of model uncertainties of the system. The presented control scheme ensures the boundedness of the closed-loop signals and the desired tracking performance of the considered micropositioning stage. Finally, experimental tests are conducted with motion trajectories of multiple frequencies for the validation of the control scheme. An average improvement of 95% in compensating the hysteresis nonlinearity and 80% in reducing the tracking error is achieved which demonstrates the efficacy of the presented control scheme. INDEX TERMS Dahl feedforward compensator, hysteresis nonlinearity, micropositioning, model uncertainties, piezoelectric actuator, µ-synthesis robust feedback controller.

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Section: B Tracking Error Analysismentioning

confidence: 87%

Robust μ-Synthesis With Dahl Model Based Feedforward Compensator Design for Piezo-Actuated Micropositioning Stage

Ahmad

Ali

2020

IEEE Access

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“…We use this Bouc–Wen model to describe the hysteresis phenomenon in the piezoelectric positioner where u ( v ) denotes the displacement output, v is the input voltage, μ 1 and μ 2 are parameters representing the piezoelectric coefficients and ζ is a nonlinear hysteretic term (Wang et al, 2016b; Zhenyan et al, 2012).…”

Section: Problem Formulation and Preliminariesmentioning

confidence: 99%

“…However, for a piezoelectric actuator, the signs of a dynamic hysteresis model are often unknown. Therefore, it is very important to control the nonlinear system with unknown direction hysteresis in practice (Rakotondrabe, 2011; Tan and Barasa, 2004; Wang et al, 2016b).…”

Section: Problem Formulation and Preliminariesmentioning

confidence: 99%

Particle swarm optimization-tuned adaptive fuzzy output feedback motion tracking control of piezo-positioning mechanism with unknown hysteresis

Naseriyeh

Jafari

Zaeifi

et al. 2019

Transactions of the Institute of Measurement and Control

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This paper considers the problem of observer-based adaptive fuzzy output feedback control for a piezo-positioning mechanism with unknown hysteresis. In this paper, fuzzy logic systems (FLSs) are used to estimate the unknown nonlinear functions, and also Nussbaum function is utilized to overcome the unknown direction hysteresis. Based on the Lyapunov method, the control scheme is constructed by using the backstepping and adaptive technique. In order to better control performance in reducing tracking error, the particle swarm optimization (PSO) algorithm is utilized for tuning the controller parameters. Proposed adaptive controller guarantees that all the closed-loop signals are semiglobally uniformly ultimately bounded (SGUUB) and the tracking error can converge to a small neighborhood of the origin. Finally, the simulation results are provided to demonstrate the effectiveness and robustness of the proposed approach.

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“…For instance, for in situ stiffness measurements on membranes of 200 nm thickness [12], an oscillation of 100 nm of the end-effector can produce the membrane destruction. Open-loop strategies can be used for hysteresis compensation [13,14] [15,16,17] and vibration damping [18,19]. However, A c c e p t e d M a n u s c r i p t in practice, it is difficult to obtain precise compensators, and hence to guarantee positioning accuracy.…”

Section: Introductionmentioning

confidence: 99%

Mixed stepping/scanning mode control of stick-slip SEM-integrated nano-robotic systems

Oubellil

Voda

Boudaoud

et al. 2019

Sensors and Actuators A: Physical

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The ability to do dexterous automated and semi-automated tasks at the micro-and nano-meter scales inside a Scanning Electron Microscope (SEM) is a critical issue for nanotechnologies. SEM-integrated nano-robotic systems with several Degrees Of Freedom (DOF) and one or several end-effectors have therefore widely emerged in research laboratories and industry. The Piezoelectric Stick-Slip (PSS) is one of the best actuation principle for SEM-integrated nano-robotic systems as it has two operating modes, namely a coarse positioning mode with long travel range, and a fine positioning mode with a resolution of the order of the nanometer. The main contribution of this paper is the design of a switch control strategy to deal efficiently and in a transparent way from the user's point of view, with the transition between the coarse and the fine operating modes of PSS actuators. The aim is to be able to perform positioning tasks with a millimeter displacement range and a nanometer resolution without worrying about the mode of operation of the actuator. The coarse mode and the fine mode are respectively controlled with a frequency/voltage proportional control and a H ∞ control. The switch control is based on an internal model of the actuator. Experimental results show the effectiveness of the new mixed coarse/fine mode control strategy to satisfy closed-loop stability and bumpless specifications at the switching time. For the best knowledge of the authors, this result is the first demonstration of such a control capability for PSS actuators.

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High-speed and precision control of a piezoelectric positioner with hysteresis, resonance and disturbance compensation

Cited by 20 publications

References 38 publications

Robust μ-Synthesis With Dahl Model Based Feedforward Compensator Design for Piezo-Actuated Micropositioning Stage

Robust μ-Synthesis With Dahl Model Based Feedforward Compensator Design for Piezo-Actuated Micropositioning Stage

Particle swarm optimization-tuned adaptive fuzzy output feedback motion tracking control of piezo-positioning mechanism with unknown hysteresis

Mixed stepping/scanning mode control of stick-slip SEM-integrated nano-robotic systems

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