High-sensitivity tunneling magneto-resistive micro-gyroscope with immunity to external magnetic interference

Li, Jin; Qin, Shucheng; Zhang, Rui; Li, Mengwei

doi:10.1038/s41598-020-73369-6

Cited by 10 publications

(8 citation statements)

References 32 publications

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“…1 . The differential voltage output of any two adjacent bridges in the multi-bridge circuits is 17 : where is the static voltage and is the static resistance of the TMR, K is the sensitivity of the TMR devices, A is the amplitude of magnetic feld, D is the line spacing of electric coils, d is the spacing distance of the adjacent bridge circuits and y is the displacement along the sense direction. From Eq.…”

Section: Principle Of Tmr Displacement Sensormentioning

confidence: 99%

“…This kind of linear MI-type sensors with a range of tens of millimeters are available. The sensing element based on the Hall effect is used to measure the magnetic field of the permanent magnet, whose field has a predefined pattern as a function of the distance from the permanent magnet 15 – 17 . As a new alternative, the displacement can be measured by detecting the magnetic flux density, according to the linear relationship between the magnetic flux and the reciprocal of displacement 18 – 23 .…”

Section: Introductionmentioning

confidence: 99%

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High-precision micro-displacement sensor based on tunnel magneto-resistance effect

Wang

et al. 2022

Sci Rep

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A high-precision micro-displacement sensor based on tunnel magneto-resistance effect is reported.We designed and simulated magnetic characteristics of the sensor, and employed chip-level Au-In bonding to implement low-temperature assembly of the TMR devices. We employed the subdivision interpolation technique to enhance the resolution by translating the sine-cosine outputs of a TMR sensor into an output that varies linearly with the displacement. Simultaneously, using the multi-bridge circuit method to suppress external magnetic and geomagnetic interference. Experimental result shows that the micro-displacement sensor has a resolution of 800 nm, accuracy of 0.14$$\%$$ % and a full-scale range of up to millimeter level. This work enables a high-performance displacement sensor, and provides a significant guide for the design of a micro-displacement sensor in practical applications.

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Section: Principle Of Tmr Displacement Sensormentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

High-precision micro-displacement sensor based on tunnel magneto-resistance effect

Wang

et al. 2022

Sci Rep

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“…The calculation formulas of corresponding damping will be [ 14 ]:

where the effective viscosity is

, the air viscosity constant is

, and the packaging pressure below standard atmospheric pressure is

is the distance between the micro-gyroscope and substrate;

and

are the number of comb fingers of the drive and sense mode;

and

are the overlapping length of the comb fingers; and

and

are the gap between the comb fingers.…”

Section: Linear Design and Analysismentioning

confidence: 99%

Design, Dynamics, and Optimization of a 3-DoF Nonlinear Micro-Gyroscope by Considering the Influence of the Coriolis Force

Wang¹,

Lu²,

Zhang³

et al. 2022

Micromachines

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In this paper, we use the nonlinear hardening stiffness of drive mode deal with the contradiction between gain and bandwidth of the linear micro-gyroscope, to improve the bandwidth and gain in sense direction. Firstly, in order to adjust the distance between two resonant peaks, we changed an incomplete two-degree-of-freedom(2-DoF) sense mode system of the micro-gyroscope into a complete 2-DoF system. Afterward, according to the given nonlinear coefficient of stiffness of drive mode, the structure size of driving micro-beams was designed to obtain a nonlinear micro-gyroscope with controllable stiffness. Finally, we investigated the effects of peaks spacing, damping, and driving nonlinearity on gain and bandwidth, and the nonlinear micro-gyroscope was optimized by orthogonal experiment method and response surface method. The results reveal that the peaks spacing has a great influence on the gain and bandwidth of both linear and nonlinear micro-gyroscopes. The larger the peaks spacing, the lower the gain, but higher gain can be achieved when the resonant frequency of the drive mode is close to the lower-order resonant frequency of the sense mode. Driving nonlinearity leads to the response peak of the Coriolis force to have a hardening characteristic, thus forming a wide platform in the sense direction. Hardening of the response peak of the Coriolis force allows the micro-gyroscope to obtain a higher gain while the bandwidth of the sense mode is also greatly improved. In addition, parameter optimization can make the gain and bandwidth of the micro-gyroscope optimal. When the peaks spacing is small and the nonlinear stiffness coefficient is about 1012.2, under the premise that the gain is basically constant, the bandwidth of the sense mode increases about 1.76 times compared with the linear gyroscope. Damping can suppress the influence of nonlinearity in a micro-gyroscope system. Within a certain range, the frequency response of the nonlinear micro-gyroscope tends to be a linear system with the increase in damping, resulting in narrower bandwidth and lower gain.

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“…The cylindrical resonator is the core component of a cylindrical resonator gyroscope, whose quality has a crucial impact on the performance of the CRG. The performance of the resonator can be improved by optimizing the resonator structure, using appropriate materials, and improving the manufacturing technology [ 4 , 5 , 6 , 7 ]. Metal materials have been widely used in resonator manufacturing for their low cost and easy processing [ 8 , 9 ].…”

Section: Introductionmentioning

confidence: 99%

Simulations and Experiments on the Vibrational Characteristics of Cylindrical Resonators with First Three Harmonic Errors

Chen¹,

Yang²,

Pan³

et al. 2022

Micromachines

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A cylindrical resonator gyroscope is a kind of Coriolis gyroscope, which measures angular velocity or angle via processing of the standing wave. The symmetry of a cylindrical resonator is destroyed by different degrees of geometric nonuniformity and structural damage in the machining process. The uneven mass distribution caused by the asymmetry of the resonator can be expressed in the form of a Fourier series. The first three harmonics will reduce the anti-interference ability of the resonator to the external vibration, as well as increase the angular random walk and zero-bias drift of the gyroscope. In this paper, the frequency split of different modes caused by the first three harmonic errors and the displacement of the center of the cylindrical resonator bottom plate are obtained by simulation, and the relationship between them is explored. The experimental results on five fused silica cylindrical resonators are consistent with the simulation, confirming the linear relationship between the n = 1 frequency split and second harmonic error. A method for evaluating the first three harmonic errors of fused silica cylindrical resonators is provided.

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High-sensitivity tunneling magneto-resistive micro-gyroscope with immunity to external magnetic interference

Cited by 10 publications

References 32 publications

High-precision micro-displacement sensor based on tunnel magneto-resistance effect

High-precision micro-displacement sensor based on tunnel magneto-resistance effect

Design, Dynamics, and Optimization of a 3-DoF Nonlinear Micro-Gyroscope by Considering the Influence of the Coriolis Force

Simulations and Experiments on the Vibrational Characteristics of Cylindrical Resonators with First Three Harmonic Errors

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