1997
DOI: 10.1109/3.644102
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High-sensitivity porous silicon photodetectors fabricated through rapid thermal oxidation and rapid thermal annealing

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Cited by 43 publications
(27 citation statements)
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“…Table 1 shows the ideality factor (Z) and the barrier height (eV) at different etching density. The values of the ideality factor are found to be around 4.6 to 2.3 at 15min etching time and different values of etching current density, (15,17,19, 21) mA/cm 2 . If the structure includes interface states, ideality factor becomes high, that accounts to the totality of Z of the individual rectifying junctions (i.e., the actual PSi/c-Si heterojunction and Schottky diodes at the Al/PSi or the two metal-semiconductor junctions (Al/PSi, p-Si/Al) of a diode preferably possess Ohmic features) thus resulting in the ideal factor to be higher than unity.…”
Section: C-v Characteristics Of Al/p-psi/p-si/al In Darkmentioning
confidence: 98%
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“…Table 1 shows the ideality factor (Z) and the barrier height (eV) at different etching density. The values of the ideality factor are found to be around 4.6 to 2.3 at 15min etching time and different values of etching current density, (15,17,19, 21) mA/cm 2 . If the structure includes interface states, ideality factor becomes high, that accounts to the totality of Z of the individual rectifying junctions (i.e., the actual PSi/c-Si heterojunction and Schottky diodes at the Al/PSi or the two metal-semiconductor junctions (Al/PSi, p-Si/Al) of a diode preferably possess Ohmic features) thus resulting in the ideal factor to be higher than unity.…”
Section: C-v Characteristics Of Al/p-psi/p-si/al In Darkmentioning
confidence: 98%
“…It relates the etching current density-voltage features of Al/PSi/pSi/Al structure formed at 15min. It is of dissimilar etching current densities (15,17,19 and 21) mA/cm 2 in which the current-voltage graphs are attained by varying the applied bias (ranging from -10 V to +10 V). Then the resultant etching current density is measured.…”
Section: Electrical Properties Of Al / Psi / P-si /Almentioning
confidence: 99%
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“…rectification ratio meaning the ratio between forward current to the reverse Current, it for as prepared was equal to 5 ,With increase oxidation time the rectification ratio increase and reach to optimum value about 21 at oxidation time (30 sec). this increased in rectification factor is attributed to the formation a thin oxide layer between AL metal and Si [7] also attributed to formation of an isotope heteojunction ,after that time the rectification ratio will be decreased is due to the defect formed by the sympathize silicon-oxygen structure in a very thin oxide layer and they would act as tunneling center, for oxidation time is longer than (30 sec) the oxide layer is thicker the tunneling probability of photo carriers and the thermal generated carriers through the oxide layer are reduced and hence the dark current to reduced [8]. The oxide thickness is estimated by using equation for high resistivity n-type for silicon [9 ].…”
Section: Expeirmental Workmentioning
confidence: 99%