High-resolution X-ray diffraction in crystalline structures with quantum dots

Abstract

We review the current status of nondestructive highresolution X-ray diffractometry research on semiconductor structures with quantum dots (QDs). The formalism of the statistical theory of diffraction is used to consider the coherent and diffuse X-ray scattering in crystalline systems with nanoinclusions. Effects of the shape, elastic strain, and lateral and vertical QD correlation on the diffuse scattering angular distribution near the reciprocal lattice nodes are considered. Using short-period and multicomponent superlattices as an example, we demonstrate the efficiency of data-assisted simulations in the quantitative analysis of nanostructured materials. Contents 1. Introduction. Methods of research on structures with quantum dots 419 2. High-resolution X-ray diffraction 420 2.1 Triple-axis X-ray diffractometry; 2.2 Statistical theory of X-ray diffraction. Coherent and diffuse scattering; 2.3 Direct and inverse X-ray diffraction problems 3. X-ray diffraction in structured media 423 3.1 Multilayer quantum dots; 3.2 Semiconductor structures with self-organized quantum dots; 3.3 Diffraction on 3D periodic quantum dot arrays 4. Influence of the quantum dot shape, size, and elastic strain on X-ray diffuse scattering 426 4.1 Diffuse scattering from epitaxial structures with quantum dots of different shapes; 4.2 Spheroidal quantum dots 5. Spatial correlations in the arrangement of quantum dots 432 5.1 Lateral correlation of quantum dots. Short-range order; 5.2 Vertical correlation of quantum dots 6. Quantitative X-ray diffraction analysis of heterostructures with quantum dots 437 6.1 Short-period superlattices with quantum dots; 6.2 Multicomponent heterostructures with quantum dots 7. Conclusion 443 References 443 Physics ± Uspekhi 58 (5) 419 ± 445 (2015) # 2015 Uspekhi Fizicheskikh Nauk, Russian Academy of Sciences V I Punegov Physics ± Uspekhi 58 (5) V I Punegov Physics ± Uspekhi 58 (5) V I Punegov Physics ± Uspekhi 58 (5)

Epitaxial alloys of AlxGa1−xAs:Mg with different types of conductivity

“…These problems included the determination of parameters of the epitaxial structures, refinement of the layer composition, separation of deformations and mis-orientations in the epitaxial layers, as well as determination of the relaxation degree of the crystal lattice parameters in the epitaxial layers relative to the parameters of substrate in heterostructures [9,25,30,31].…”

Эпитаксиальные твердые растворы Al-=SUB=-x-=/SUB=-Ga-=SUB=-1-x-=/SUB=-As : Mg с различным типом проводимости

“…В современных исследованиях полупроводниковых наногетероструктур использование метода высокораз-решающей рентгеновской дифрактометрии позволяет решать целый ряд задач, среди которых определение параметров эпитаксиальных структур, уточнение соста-ва слоев, разделение деформаций и разориентаций в эпитаксиальных слоях, a также определение степени релаксации параметров кристаллической решетки эпи-таксиальных слоев к параметру подложки в гетерострук-турах [9,25,30,31].…”

Simulation of X-ray diffraction in a cylindrical crystal

“…At present, triple-crystal diffractometry (Iida & Kohra, 1979;Punegov, 2015) and Bragg coherent diffraction imaging (Robinson et al, 2001;Pavlov et al, 2017Pavlov et al, , 2018Shabalin et al, 2017) are widely applied to the study of crystalline structures. Calculations of rocking curves and reciprocal space maps RSMs) for lateral crystals of rectangular cross section have been performed using the Takagi equations (Kolosov & Punegov, 2005) and two-dimensional recurrence relations (Punegov et al, 2014(Punegov et al, , 2016.…”