In this work the investigations of the argon inductively coupled plasma sputtering of the Pb 1−x Sn x Te thin films with the composition variation of x = 0.16-0.95 grown by hot wall deposition technique on glass substrates were carried out. As-grown films had a columnar polycrystalline structure with the grain lateral dimensions of 0.2-5.0 μm, and the dependence of the lattice constant on composition x had a linear behaviour described by the Vegard's law. Energy dispersive x-ray microanalysis showed the presence of 5-8 at.% of oxygen in the films, which can be accumulated from the ambient air or from the substrate in the inter-grain boundaries. A phenomenon of a sputtering rate decrease for the polycrystalline lead tin telluride films in comparison to the single-crystal films is discussed. A novel important phenomenon of the formation of nanostructure arrays on the surface of the Pb 1−x Sn x Te thin films with the dependence on the sputtering rate during plasma treatment is reported.