High resolution temperature mapping of microelectronic structures using quantitative fluorescence microthermography

Herzum, C.; Boit, Christian; Kölzer, J.; Otto, J.; Weiland, R.

doi:10.1016/s0026-2692(97)00054-2

Cited by 14 publications

(8 citation statements)

References 3 publications

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“…For EuTTA the temperature sensitivity of the emission intensity for this peak is typical 4%/K in the temperature range 5290 C. FMI has been shown to have a spatial resolution down to 0:7 mm and a temperature resolution of 6 mK at room temperature. In practical use FMI has been applied in several reports for electronic failure analysis [3][4][5], failure in solar cell [6] and study of biologicals cells [7]. Heat generation in superconductors has been measured at temperatures down to 50 K [8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Temperature dependent photoluminescence down to 4.2K in EuTFC

Haugen¹,

Johansen²

2008

Journal of Luminescence

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Section: Introductionmentioning

confidence: 99%

Temperature dependent photoluminescence down to 4.2K in EuTFC

Haugen¹,

Johansen²

2008

Journal of Luminescence

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“…However, the reduction of d c decreases A c (= πd 2 c /4), and results in an increased x n , as shown in Eq. (6). The reason for this increase can be found in Eq.…”

Section: The Design and Fabrication Of A Sthm Probe With High Spmentioning

confidence: 88%

“…Hence, to reduce d c and x n simultaneously, S probe should be maximized and T n should be minimized, as shown in Eq. (6).…”

Section: The Design and Fabrication Of A Sthm Probe With High Spmentioning

confidence: 99%

“…One group of these techniques are non-contact methods such as infrared or near-infrared thermography, 1, 2 thermoreflectance, [3][4][5] photoluminescence, 6 Raman spectroscopy, 7, 8 fluorescence thermography, 9,10 and near-field optical thermography. 11,12 However, in spite of many advantages, these techniques are not suitable for measurement that requires nanoscale resolution.…”

Section: Introductionmentioning

confidence: 99%

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Enabling low-noise null-point scanning thermal microscopy by the optimization of scanning thermal microscope probe through a rigorous theory of quantitative measurement

Hwang

Chung

Kwon

2014

Review of Scientific Instruments

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The application of conventional scanning thermal microscopy (SThM) is severely limited by three major problems: (i) distortion of the measured signal due to heat transfer through the air, (ii) the unknown and variable value of the tip-sample thermal contact resistance, and (iii) perturbation of the sample temperature due to the heat flux through the tip-sample thermal contact. Recently, we proposed null-point scanning thermal microscopy (NP SThM) as a way of overcoming these problems in principle by tracking the thermal equilibrium between the end of the SThM tip and the sample surface. However, in order to obtain high spatial resolution, which is the primary motivation for SThM, NP SThM requires an extremely sensitive SThM probe that can trace the vanishingly small heat flux through the tip-sample nano-thermal contact. Herein, we derive a relation between the spatial resolution and the design parameters of a SThM probe, optimize the thermal and electrical design, and develop a batch-fabrication process. We also quantitatively demonstrate significantly improved sensitivity, lower measurement noise, and higher spatial resolution of the fabricated SThM probes. By utilizing the exceptional performance of these fabricated probes, we show that NP SThM can be used to obtain a quantitative temperature profile with nanoscale resolution independent of the changing tip-sample thermal contact resistance and without perturbation of the sample temperature or distortion due to the heat transfer through the air.

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“…These encompass optical techniques such as infrared or near-infrared thermography, 1,2 thermoreflectance, 3,4,5 photoluminescence 6 or Raman spectroscopy. 7,8 Contact techniques overcome part of these drawbacks but thermal diffusion between the sample and the sensor becomes the main error source that needs to be carefully addressed.…”

Section: Introductionmentioning

confidence: 99%

Quantitative thermal microscopy using thermoelectric probe in passive mode

Bontempi

Thiéry

Teyssieux

et al. 2013

Review of Scientific Instruments

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A scanning thermal microscope working in passive mode using a micronic thermocouple probe is presented as a quantitative technique. We show that actual surface temperature distributions of microsystems are measurable under conditions for which most of usual techniques cannot operate. The quantitative aspect relies on the necessity of an appropriate calibration procedure which takes into account of the probeto-sample thermal interaction prior to any measurement. Besides this consideration that should be treated for any thermal contact probing system, the main advantages of our thermal microscope deal with the temperature available range, the insensitivity to the surface optical parameters, the possibility to image DC and AC temperature components up to 1 kHz typically and a resolution limit related to near-field behavior.

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High resolution temperature mapping of microelectronic structures using quantitative fluorescence microthermography

Cited by 14 publications

References 3 publications

Temperature dependent photoluminescence down to 4.2K in EuTFC

Temperature dependent photoluminescence down to 4.2K in EuTFC

Enabling low-noise null-point scanning thermal microscopy by the optimization of scanning thermal microscope probe through a rigorous theory of quantitative measurement

Quantitative thermal microscopy using thermoelectric probe in passive mode

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