Quantitative thermal microscopy using thermoelectric probe in passive mode

Abstract

A scanning thermal microscope working in passive mode using a micronic thermocouple probe is presented as a quantitative technique. We show that actual surface temperature distributions of microsystems are measurable under conditions for which most of usual techniques cannot operate. The quantitative aspect relies on the necessity of an appropriate calibration procedure which takes into account of the probeto-sample thermal interaction prior to any measurement. Besides this consideration that should be treated for any thermal contact probing system, the main advantages of our thermal microscope deal with the temperature available range, the insensitivity to the surface optical parameters, the possibility to image DC and AC temperature components up to 1 kHz typically and a resolution limit related to near-field behavior.

Low-Power Heating Platform for the Characterization and Calibration of Scanning Thermal Probes

“…It clearly shows a large reduction of power consumption and subsequently a greater sensitivity in the measurement of the thermal perturbation, as shown in the zoomed blue area. The mean values of the thermal responses of the SThM probe = (see [1,3]) were found to be 0.79 and 0.6 for Vlarge and Vsmall, respectively. Such a factor is one of the most significant parameters that characterize temperature probe efficiency and can be used to correct the measured temperature value.…”

“…Derived from Atomic Force Microscopes, they are able to operate in two complementary modes, either in passive mode for surface temperature measurements [1], or in active mode for thermal parameters estimation (thermal conductivity or diffusivity typically) [2]. However, none of these modes are reliable yet due to the complexity of the thermal interaction between the probe tip and a sample surface.…”

Calibration Tools for Scanning Thermal Microscopy Probes Used in Temperature Measurement Mode

“…Scanning Thermal Microscope (SThM) has become a major tool for investigating heat transfer at very low scales. Derived from Atomic Force Microscope (AFM), most of the systems can operate in two complementary modes, either in passive mode for surface temperature measurements [1], or in active mode for the estimation of parameters with a thermal or temperature dependence, i.e. the thermal conductivity or diffusivity [2].…”

Photo-thermal quartz tuning fork excitation for dynamic mode atomic force microscope

“…We plan to use it as a force control in a scanning thermal microscope by replacing the tungsten tip with a microthermocouple. 28 …”