High-resolution real-time ion-camera system using a CMOS-based chemical sensor array for proton imaging

Németh, Balázs Csaba; Piechocinski, Marek; Cumming, David R. S.

doi:10.1016/j.snb.2012.05.066

Cited by 49 publications

(31 citation statements)

References 10 publications

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“…As shown in Fig. 1a, each pixel comprises 4 transistors, where P2 is a PMOS ISFET transistor configured as a voltage-follower for hydrogen ion concentration detection, P1 is an in-pixel current source for P2, and P3 and N1 form a transmission gate for addressing using col and col ̅̅̅̅̅ [16]. The size of each pixel is 10.2 µm  10.2 µm, so that the entire array occupies an area of approximately 2.87 mm  2.87 mm.…”

Section: A 256  256 Isfet Array Chipmentioning

confidence: 99%

“…The metal layout in each pixel uses a metalvia stack to contact the underlying transistor to the top metal layer (MET 4) beneath the dielectric passivation layer. The MET 4 plate therefore forms a capacitor with the analyte above the chip [16]. The dielectric in contact with MET 4 acts as an ion sensing material which translates the hydrogen ion concentration in the analyte to a voltage at the polysilicon gate of the ISFET according to the Nernst equation.…”

Section: B Post-processing Of the Cmos Chipmentioning

confidence: 99%

“…Alternatively, the device may be coated with another dielectric, such as Ta 2 O 5 , which has been shown to give a response as large as 58 mV/pH [21]. The Ta 2 O 5 is a thin insulator and therefore does not modify the cross-talk properties of the individual sensors that have previously been shown to be capable of forming images [16].…”

Section: B Post-processing Of the Cmos Chipmentioning

confidence: 99%

“…The earliest devices were made using specialist one-off processes, but more recently research has shown that good devices can be made using standard complementary metal oxide semiconductor processes [14]. Further work led to the implementation of arrays of sensors, much like a camera using photodiodes [15], [16]. Using these devices it has been possible to show that chemical imaging using sensor signal variation as the image contrast mechanism is possible.…”

Section: Introductionmentioning

confidence: 99%

“…Averaging over more than one sensor leads to a significant improvement in noise, hence effective sensitivity. To thoroughly explore this possibility a very large array of 2 16 sensors has been deployed.…”

Section: Introductionmentioning

confidence: 99%

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An Integrated Circuit for Chip-Based Analysis of Enzyme Kinetics and Metabolite Quantification

Cheah

MacDonald

Martin

et al. 2016

IEEE Trans. Biomed. Circuits Syst.

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Abstract-We have created a novel chip-based diagnostic tools based upon quantification of metabolites using enzymes specific for their chemical conversion. Using this device we show for the first time that a solid-state circuit can be used to measure enzyme kinetics and calculate the Michaelis-Menten constant. Substrate concentration dependency of enzyme reaction rates is central to this aim. Ion-sensitive field effect transistors (ISFET) are excellent transducers for biosensing applications that are reliant upon enzyme assays, especially since they can be fabricated using mainstream microelectronics technology to ensure low unit cost, mass-manufacture, scaling to make many sensors and straightforward miniaturisation for use in point-of-care devices. Here, we describe an integrated ISFET array comprising 2 16 sensors. The device was fabricated with a complementary metal oxide semiconductor (CMOS) process. Unlike traditional CMOS ISFET sensors that use the Si 3 N 4 passivation of the foundry for ion detection, the device reported here was processed with a layer of Ta 2 O 5 that increased the detection sensitivity to 45 mV/pH unit at the sensor readout. The drift was reduced to 0.8 mV/hour with a linear pH response between pH 2 -12. A high-speed instrumentation system capable of acquiring nearly 500 fps was developed to stream out the data. The device was then used to measure glucose concentration through the activity of hexokinase in the range of 0.05 mM -231 mM, encompassing glucose's physiological range in blood. Localised and temporal enzyme kinetics of hexokinase was studied in detail. These results present a roadmap towards a viable personal metabolome machine. Index Terms-Biosensor, CMOS, electrochemical sensor, enzyme kinetics, hexokinase, ion-sensitive field effect transistors (ISFET), metabolomics, point-of-care (POC) diagnostics.

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Section: A 256  256 Isfet Array Chipmentioning

confidence: 99%

Section: B Post-processing Of the Cmos Chipmentioning

confidence: 99%

Section: B Post-processing Of the Cmos Chipmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

An Integrated Circuit for Chip-Based Analysis of Enzyme Kinetics and Metabolite Quantification

Cheah

MacDonald

Martin

et al. 2016

IEEE Trans. Biomed. Circuits Syst.

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CMOS Dual‐mode pH‐Image Sensor

Yan²,

Huang

2018

CMOS Integrated Lab‐on‐a‐Chip System for Personalized Biomedical Diagnosis

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A comprehensive review of FET‐based pH sensors: materials, fabrication technologies, and modeling

Sinha

Pal

2021

Electrochemical Science Adv

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The demand for miniaturized point‐of‐care chemical/biochemical sensors has driven the development of field‐effect transistors (FETs) based pH sensors over the last 50 years. This paper aims to review the fabrication technologies, device structures, sensing film materials, and modeling techniques utilized for FET‐based pH sensors. We present the governing principles of potentiometric sensors, with major focus on the working principles of ion‐sensitive FETs (ISFETs). We extensively review different sensing film materials deposited by various techniques, which is critical to the sensing performance of ISFETs. The popular fabrication technologies have been presented, with special emphasis on state‐of‐the‐art silicon‐on‐insulator based technology, which can achieve high sensitivity by utilizing the dual‐gate effect. Furthermore, recent advancements in nano‐ISFETs has been elucidated. We also discuss the adoption of unmodified complementary metal‐oxide semiconductor (CMOS) ISFETs using standard CMOS processes, which has enabled the fabrication of integrated ISFET arrays, which are especially suited for ion‐imaging applications. Moreover, recent developments in extended‐gate FETs has been discussed, which have gained lot of attention due to their design flexibility and ease of fabrication, which is desirable for wearable sensing applications. In addition, recently there have been efforts to utilize nonsilicon channel materials for pH‐sensing application to obtain superior performance and various channel materials have been reviewed. Finally, we have extensively reviewed the ISFET device modeling and simulation techniques using various computer‐aided design tools, which aid in sensor design and characterization.

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High-resolution real-time ion-camera system using a CMOS-based chemical sensor array for proton imaging

Cited by 49 publications

References 10 publications

An Integrated Circuit for Chip-Based Analysis of Enzyme Kinetics and Metabolite Quantification

An Integrated Circuit for Chip-Based Analysis of Enzyme Kinetics and Metabolite Quantification

CMOS Dual‐mode pH‐Image Sensor

A comprehensive review of FET‐based pH sensors: materials, fabrication technologies, and modeling

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