High resolution femtosecond direct laser writing with wrapped lens

Toulouse, Andrea; Thiele, Simon; Hirzel, Kai; Schmid, M.; Weber, Ksenia; Zyrianova, Maria; Gießen, Harald; Herkommer, Alois; Heymann, Michaël

doi:10.1364/ome.468534

Cited by 7 publications

(3 citation statements)

References 30 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…[ 604 ] To reduce the usage of materials, printing with a wrapped lens is a simple way while maintaining the high resolution. [ 762 ] Furthermore, other novel techniques like microfluidic‐assisted 3D printing, [ 501 ] sacrificial‐scaffold‐mediated TPL, [ 763 ] and mask‐assisted double‐sided TPL [ 764 ] could be used for specific optical element fabrications.…”

Section: Challenges and Perspectivementioning

confidence: 99%

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Wang

Zhang

Ladika

et al. 2023

Adv Funct Materials

View full text Add to dashboard Cite

The rapid development of additive manufacturing has fueled a revolution in various research fields and industrial applications. Among the myriad of advanced three-dimensional printing techniques, two-photon polymerization lithography (TPL) uniquely offers a significant electron microscope (SEM) images of SMP structures before and after programming and after recovery, respectively. Reproduced under terms of the CC-BY license. [114] Copyright 2021, The Authors, published by Nature Publishing Group. b) Stiff SMPs for high-resolution reversible nanophotonics. I-II) The deformed and recovered nanopillars under optical microscope and SEM, respectively. Reproduced with permission. [115] Copyright 2022, American Chemical Society. c) Vapor-responsive photonic arrays. I-IV) Optical image of a grid array in air, in water vapors ~ 20 s, saturation with water vapors ~ 88s, and after the gas flow stopped, respectively.Reproduced under terms of the CC-BY license. [116] Copyright 2021, The Authors, published by Royal Society of Chemistry. d) SEM image of a 40-layer face-cantered-cubic photonic structure printed by SU-8. Reproduced with permission. [117] Copyright 2004, Nature Publishing Group. e) SEM image of helices with an axial pitch of 800 nm and a radius of 800 nm fabricated by the two-step absorption photoresist. Reproduced with permission. [118]

show abstract

Section: Challenges and Perspectivementioning

confidence: 99%

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Wang

Zhang

Ladika

et al. 2023

Adv Funct Materials

View full text Add to dashboard Cite

show abstract

“…We use a Nanoscribe Photonic Professional GT direct laser writing machine on indium tin oxide‐coated glass substrates. For the fabrication of the different apertures, we use the wrapped femtosecond direct laser writing method [ 43 ] to avoid any contact of the material with the objective and possible coloring. We use the wrapped objective in dip‐in mode resulting in a constant beam path length through the material thus constant writing intensity in the focal spot.…”

Section: Materials Propertiesmentioning

confidence: 99%

3D Direct Laser Writing of Highly Absorptive Photoresist for Miniature Optical Apertures

Schmid

Toulouse

Thiele

et al. 2022

Adv Funct Materials

Self Cite

View full text Add to dashboard Cite

The importance of 3D direct laser writing as an enabling technology increased rapidly in recent years. Complex micro‐optics and optical devices with various functionalities are now feasible. Different possibilities to increase the optical performance are demonstrated, for example, multi‐lens objectives, a combination of different photoresists, or diffractive optical elements. It is still challenging to create fitting apertures for these micro optics. In this work, a novel and simple way to create 3D‐printed opaque structures with a highly absorptive photoresist is introduced, which can be used to fabricate microscopic apertures increasing the contrast of 3D‐printed micro optics and enabling new optical designs. Both hybrid printing by combining clear and opaque resists, as well as printing transparent optical elements and their surrounding opaque apertures solely from a single black resist by using different printing thicknesses are demonstrated.

show abstract

“…Particularly in the field of micro-and nanooptical element and system processing, FsLDW shows various advantages compared to the aforementioned processing methods 44,45 . First, owing to its nonlinear multiphoton absorption characteristics, FsLDW exhibits processing accuracy beyond the diffraction limit 46 . It can process voxels smaller than 100 nm using sizeable numerical aperture (NA) objectives [47][48][49] .…”

Section: Introductionmentioning

confidence: 99%

Imaging/nonimaging microoptical elements and stereoscopic systems based on femtosecond laser direct writing

Huang,

Hong,

Chen

et al. 2023

gxjzz

View full text Add to dashboard Cite

The development of modern information technology has led to significant demand for microoptical elements with complex surface profiles and nanoscale surface roughness. Therefore, various micro-and nanoprocessing techniques are used to fabricate microoptical elements and systems. Femtosecond laser direct writing (FsLDW) uses ultrafast pulses and the ultraintense instantaneous energy of a femtosecond laser for micro-nano fabrication. FsLDW exhibits various excellent properties, including nonlinear multiphoton absorption, high-precision processing beyond the diffraction limit, and the universality of processable materials, demonstrating its unique advantages and potential applications in three-dimensional (3D) micro-nano manufacturing. FsLDW has demonstrated its value in the fabrication of various microoptical systems. This study details three typical principles of FsLDW, several design considerations to improve processing performance, processable materials, imaging/nonimaging microoptical elements, and their stereoscopic systems. Finally, a summary and perspective on the future research directions for FsLDW-enabled microoptical elements and stereoscopic systems are provided.

show abstract

High resolution femtosecond direct laser writing with wrapped lens

Cited by 7 publications

References 30 publications

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

3D Direct Laser Writing of Highly Absorptive Photoresist for Miniature Optical Apertures

Imaging/nonimaging microoptical elements and stereoscopic systems based on femtosecond laser direct writing

Contact Info

Product

Resources

About