Abstract:Microstructure and morphology of Al-oxide layers in magnetic tunnel junctions (MTJs) were characterized using high resolution electron microscopy (HREM). The MTJs were fabricated using magnetron sputtering. The Al-oxide layers were prepared using four different methods; natural, thermal, and plasma oxidation techniques as well as sputtering from pure alumina. HREM results showed that sputtering conditions, surface roughness of the bottom electrode in the MTJs, and oxidation conditions for the Al-oxide are esse… Show more
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