High quality shadow masks for top contact organic field effect transistors using deep reactive ion etching

Aljada, Muhsen; Mutkins, Karyn; Vamvounis, George; Burn, Paul L.; Meredith, Paul

doi:10.1088/0960-1317/20/7/075037

Cited by 18 publications

(12 citation statements)

References 15 publications

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“…While shadow masks can be fabricated and integrated into a device using photolithography (Aljada et al 2010), in our experiment, the shadow mask is only needed for the O 2 plasma treatment, thus a reusable, simple, and cheap mask was preferred. The mask was machined from an aluminum plate using computer numerical control (CNC) micromachining.…”

Section: Methodsmentioning

confidence: 99%

Shadow masking for nanomaterial-based biosensors incorporated with a microfluidic device

Huang

Lee

Liu

et al. 2013

Biomed Microdevices

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Integrating PDMS channels and chips containing pre-functionalized biosensors into microfluidic devices with irreversible sealing has been challenging because the integration process requires use of an O2 plasma treatment that usually destroys the biosensors. In this study, we examined the usefulness of introducing a shadow mask into the process as a method of protecting the pre-functionalized biosensors. Single nanowire sensors were pre-functionalized with fluorescently labeled biomolecules and then subjected to O2 plasma with and without the shadow mask. Results for the two groups were then compared. Those sensors without a shadow mask were destroyed, giving the sensor an infinite resistance and reduced fluorescence intensity. In contrast, the sensors with the shadow mask were protected and exhibited little changes in the resistance and fluorescence intensity. Then two different nanowires, aptamers incorporated polypyrrole nanowire (entrapment) and antibodies immobilized polyaniline nanowire (surface covalent binding), were used to investigate their detection performance before and after the plasma treatment in the presence of shadow mask. The protected samples showed a good sensitivity to the targets with a slight reduction in response compared to the as-prepared samples. After the O2 plasma treatment, the microfluidic channels were integrated with single nanowire biosensors. This microfluidic biosensor showed a high sensitivity with about ~0.5% change in conductance at the lowest IgE protein concentration of 10 pM.

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Section: Methodsmentioning

confidence: 99%

Shadow masking for nanomaterial-based biosensors incorporated with a microfluidic device

Huang

Lee

Liu

et al. 2013

Biomed Microdevices

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“…20 mg/ml solutions of each dendrimer were made in toluene, and spin-cast at 1500 rpm/60 s forming ~95 nm thick films (film thickness was measured using a DEKTAK 150 profilometer). Top contacts of MoO 3 (15 nm) then Au (30 nm) were vacuum deposited (vacuum = 2 × 10 −6 mbar, rate ~0.4 Å/s) through DRIE shadow masks 20 forming channel lengths L = 50 to 200 µm and channel widths ω = 1000, 2000 and 3000 µm with ω/L = 50 to 400. OFETs were characterized using an Agilent B1500A Semiconductor Devices Analyzer and an SA-6 Semi-Auto Prober.…”

Section: Experimental Methodsmentioning

confidence: 99%

Charge transport properties of carbazole dendrimers in organic field-effect transistors

et al. 2011

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We report three generations of p-type dendrimer semiconductors comprised of spirobifluorene cores, carbazole branching units and fluorene surface groups for use in organic field-effect transistors (OFETs). The group of dendrimers are defined by their generation and noted as SBF-(Gx) 2 , where x is the generation. Top contact-bottom gate OFETs were fabricated by spin-coating the dendrimers onto an n-octyltrichlorosilane (OTS) passivated silicon dioxide surface. The dendrimer films were found to be amorphous. The highest mobility was measured for the first generation dendrimer (SBF-(G1) 2 ), which had an average mobility of (6.6 ± 0.2) × 10 −5 cm 2 /V s and an ON/OFF ratio of 3.0 × 10 4 . As the generation of the dendrimer was increased there was only a slight decrease in the measured mobility in spite of the significantly different molecular sizes of the dendrimers. The mobility of SBF-(G3) 2 , which had a hydrodynamic radius almost twice of SBF-(G1) 2 , still had an average mobility of (4.7 ± 0.6) × 10 −5 cm 2 /V s and an ON/OFF ratio of 2.7 × 10 3 . Density functional theory calculations showed that the highest occupied molecular orbital was distributed over the core and carbazole units meaning that both intra-and intermolecular charge transfer could occur enabling the hole mobility to remain essentially constant even though the dendrimers would pack differently in the solid-state.

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“…While the main advantage of the stencil lithography is its compatibility with variety of materials which can be deposited, it can also offer unique capabilities in patterning on flexible substrates as well as patterning on top of complex 3D structures . Moreover, its resistless nature provides biocompatible environment for many bioapplications …”

mentioning

confidence: 99%

A Novel Large‐Scale, Multilayer, and Facilely Aligned Micropatterning Technique Based on Flexible and Reusable SU‐8 Shadow Masks

Moradi

Bandari

et al. 2019

Adv Materials Technologies

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A simple method to fabricate flexible, mechanically robust, and reusable SU‐8 shadow masks is demonstrated. This shadow mask technology has high pattern flexibility as various shapes with different dimensions can be created. The fabricated shadow masks are characterized in terms of the resolution, reusability, and capability of multilayer surface micropatterning. Fabrication of a new plastic photomask for the exposure process simplifies the shadow mask fabrication process and results in higher resolution in the shadow mask structures compared to the commercial chromium photomasks. For the multilayer surface micropatterning technology, a simple and fast alignment technique based on SU‐8 pillars and without usage of any microscopic tools is reported. This unique method leads to a less complicated alignment process with the alignment accuracy of ≈2 µm. The proposed shadow mask technology can be easily employed for wafer‐scale micropatterning process. The capability of fabricated SU‐8 shadow masks in micropatterning on polymer thin films is evaluated by fabricating metallic contacts on poly(3,4‐ethylenedioxythiophene) samples and electrical characterization.

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High quality shadow masks for top contact organic field effect transistors using deep reactive ion etching

Cited by 18 publications

References 15 publications

Shadow masking for nanomaterial-based biosensors incorporated with a microfluidic device

Shadow masking for nanomaterial-based biosensors incorporated with a microfluidic device

Charge transport properties of carbazole dendrimers in organic field-effect transistors

A Novel Large‐Scale, Multilayer, and Facilely Aligned Micropatterning Technique Based on Flexible and Reusable SU‐8 Shadow Masks

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