Optical Interference Coatings Conference (OIC) 2022 2022
DOI: 10.1364/oic.2022.td.9
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High quality optical Indium Tin Oxide (ITO) layers deposited by Ion Beam Sputtering (IBS)

Konstantina Kostourou1,
Volker Scheuer2,
Daniel Kopf3

Abstract: A study of the electrical properties of ITO layers combined with underlying optical interference layers and their optical properties and surface roughness.

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