High quality factor gigahertz frequencies in nanomechanical diamond resonators

Gaidarzhy, A.; Imboden, Matthias; Mohanty, Pritiraj; Rankin, Janet; Sheldon, Brian W.

doi:10.1063/1.2804573

Cited by 85 publications

(71 citation statements)

References 16 publications

(26 reference statements)

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“…The thermal expansion mismatch between the diamond film and the SiO 2 /Si substrate produces compressive stress, when the sample is cooled down from the deposition temperature. The growth process itself produces intrinsic tensile stress, which can counteract some of the thermally induced compressive stress 38 . Depending on the location on the wafer from which the chip was fabricated, both compressive and tensile internal stress can therefore be found.…”

Section: Resultsmentioning

confidence: 99%

Diamond-integrated optomechanical circuits

et al. 2013

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Diamond offers unique material advantages for the realization of micro-and nanomechanical resonators because of its high Young's modulus, compatibility with harsh environments and superior thermal properties. At the same time, the wide electronic bandgap of 5.45 eV makes diamond a suitable material for integrated optics because of broadband transparency and the absence of free-carrier absorption commonly encountered in silicon photonics. Here we take advantage of both to engineer full-scale optomechanical circuits in diamond thin films. We show that polycrystalline diamond films fabricated by chemical vapour deposition provide a convenient wafer-scale substrate for the realization of high-quality nanophotonic devices. Using free-standing nanomechanical resonators embedded in on-chip Mach-Zehnder interferometers, we demonstrate efficient optomechanical transduction via gradient optical forces. Fabricated diamond resonators reproducibly show high mechanical quality factors up to 11,200. Our low cost, wideband, carrier-free photonic circuits hold promise for all-optical sensing and optomechanical signal processing at ultra-high frequencies.

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Section: Resultsmentioning

confidence: 99%

Diamond-integrated optomechanical circuits

et al. 2013

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“…As diamond excels in many properties such as mechanical strength, optical transparency, thermal conductivity and chemical resistance, the material is an interesting platform for integrated-nanoscale devices. Diamond is, for example, a promising choice for lowloss photonic devices 19,20 and ultra-high-frequency mechanics 21 . In addition, diamond hosts interesting intrinsic dopants-most prominently the nitrogen-vacancy centre-that have been recognized as rich resource for single-photon generation 22 , quantum engineering 23 and nanoscale magnetic sensing 24 .…”

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confidence: 99%

Single-crystal diamond nanomechanical resonators with quality factors exceeding one million

et al. 2014

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Diamond has gained a reputation as a uniquely versatile material, yet one that is intricate to grow and process. Resonating nanostructures made of single-crystal diamond are expected to possess excellent mechanical properties, including high-quality factors and low dissipation. Here we demonstrate batch fabrication and mechanical measurements of single-crystal diamond cantilevers with thickness down to 85 nm, thickness uniformity better than 20 nm and lateral dimensions up to 240 mm. Quality factors exceeding one million are found at room temperature, surpassing those of state-of-the-art single-crystal silicon cantilevers of similar dimensions by roughly an order of magnitude. The corresponding thermal force noise for the best cantilevers is B5 Á 10 À 19 N Hz À 1/2 at millikelvin temperatures. Single-crystal diamond could thus directly improve existing force and mass sensors by a simple substitution of resonator material. Presented methods are easily adapted for fabrication of nanoelectromechanical systems, optomechanical resonators or nanophotonic devices that may lead to new applications in classical and quantum science.

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“…[7][8][9][10][11] This is due to their superior physical properties such as a high Young's modulus, their stable and inert surface with low adhesion to other materials, and their good tribological performance. [12][13][14] High-frequency devices based on MEMS or NEMS structures have a large surface to volume ratio and can have high dissipation if surface effects dominate the loss mechanisms.…”

Section: Introductionmentioning

confidence: 99%

Mechanical stiffness and dissipation in ultrananocrystalline diamond microresonators

et al. 2009

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We have characterized mechanical properties of ultrananocrystalline diamond UNCD thin films grown using the hot filament chemical vapor deposition HFCVD technique at 680 °C, significantly lower than the conventional growth temperature of 800 °C. The films have 4.3% sp2 content in the near-surface region as revealed by near edge x-ray absorption fine structure spectroscopy. The films, 1 m thick, exhibit a net residual compressive stress of 3701 MPa averaged over the entire 150 mm wafer. UNCD microcantilever resonator structures and overhanging ledges were fabricated using lithography, dry etching, and wet release techniques. Overhanging ledges of the films released from the substrate exhibited periodic undulations due to stress relaxation. This was used to determine a biaxial modulus of 8382 GPa. Resonant excitation and ring-down measurements in the kHz frequency range of the microcantilevers were conducted under ultrahigh vacuum UHV conditions in a customized UHV atomic force microscope system to determine Young's modulus as well as mechanical dissipation of cantilever structures at room temperature. Young's modulus is found to be 79030 GPa. Based on these measurements, Poisson's ratio is estimated to be 0.0570.038. The quality factors Q of these resonators ranged from 5000 to 16000. These Q values are lower than theoretically expected from the intrinsic properties of diamond. The results indicate that surface and bulk defects are the main contributors to the observed dissipation in UNCD resonators. We have characterized mechanical properties of ultrananocrystalline diamond ͑UNCD͒ thin films grown using the hot filament chemical vapor deposition ͑HFCVD͒ technique at 680°C, significantly lower than the conventional growth temperature of ϳ800°C. The films have ϳ4.3% sp 2 content in the near-surface region as revealed by near edge x-ray absorption fine structure spectroscopy. The films, ϳ1 m thick, exhibit a net residual compressive stress of 370Ϯ 1 MPa averaged over the entire 150 mm wafer. UNCD microcantilever resonator structures and overhanging ledges were fabricated using lithography, dry etching, and wet release techniques. Overhanging ledges of the films released from the substrate exhibited periodic undulations due to stress relaxation. This was used to determine a biaxial modulus of 838Ϯ 2 GPa. Resonant excitation and ring-down measurements in the kHz frequency range of the microcantilevers were conducted under ultrahigh vacuum ͑UHV͒ conditions in a customized UHV atomic force microscope system to determine Young's modulus as well as mechanical dissipation of cantilever structures at room temperature. Young's modulus is found to be 790Ϯ 30 GPa. Based on these measurements, Poisson's ratio is estimated to be 0.057Ϯ 0.038. The quality factors ͑Q͒ of these resonators ranged from 5000 to 16000. These Q values are lower than theoretically expected from the intrinsic properties of diamond. The results indicate that surface and bulk defects are the main contributors to the observed dissipation in UNCD re...

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High quality factor gigahertz frequencies in nanomechanical diamond resonators

Cited by 85 publications

References 16 publications

Diamond-integrated optomechanical circuits

Diamond-integrated optomechanical circuits

Single-crystal diamond nanomechanical resonators with quality factors exceeding one million

Mechanical stiffness and dissipation in ultrananocrystalline diamond microresonators

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