High-purity silicon soft x-ray imaging sensor array

Audet, S.A.; Schooneveld, E.M.; Wouters, S.E.; Kim, M.H.

doi:10.1016/0924-4247(89)80020-2

Cited by 11 publications

(2 citation statements)

References 5 publications

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“…Solid-state detectors directly convert ionizing radiation into electrical pulses, achieving energy resolution superior to scintillators [7][8][9]. However, some require cryogenic cooling to distinguish radiation type and energy and can be susceptible to performance degradation due to radiation damage [10].…”

Section: Introductionmentioning

confidence: 99%

A bulk silicon micromachined structure for gas microdischarge-based detection of beta-particles

Eun

Wilson

Gianchandani

2008

J. Micromech. Microeng.

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This paper describes two Si micromachined structures for sensing beta-particles. The basic device (the micro-detector) includes a square silicon cathode surrounded by a concentric anode, and is formed by stacks of glass and Si wafers. Incident beta-particles ionize the gas encapsulated between the electrodes, resulting in an avalanche current pulse or 'count'. It is shown experimentally that devices with 8 × 8 mm 2 footprint can detect radiation in the proximity of sealed sources, such as 90 Sr and 204 Tl with 0.1-1.0 µCi strengths. The sensitivity (cpm mRad −1 h) of the micromachined device is comparable to that of commercial radiation detectors, but substantially superior when normalized to the detector volume, which is about 0.06% of the conventional detectors. An extension of the basic device, the stacked micro-detector, consists of a two-tiered arrangement of cavities separated by a thin glass intercavity attenuator that is intended to provide controlled energy absorption. Higher energy particles are detected in both cavities, while lower energy particles are detected in the first cavity and subsequently absorbed by the intercavity attenuator. This can provide initial assessment of the incident radiation without adding significant complexity to the system. Preliminary experimental validation is performed by comparing the device response to 204 Tl and 90 Sr.

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Section: Introductionmentioning

confidence: 99%

A bulk silicon micromachined structure for gas microdischarge-based detection of beta-particles

Eun

Wilson

Gianchandani

2008

J. Micromech. Microeng.

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“…Since a few radioactive materials emit X-rays, one possibility is to exploit X-ray detectors, which have benefited from solid-state technology in recent years [1]. Unfortunately, most radioisotopes are not sources of Xrays, and the best way to detect most of the target species for dirty bombs is through their emission of beta particles.…”

Section: Introductionmentioning

confidence: 99%

Microgeiger: A Micromachined Gas-Based Beta Radiation Detector

Wilson

Gianchandani²

2004

2004 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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This paper reports a micromachined Geiger counter fabricated from a glass-Si-glass stack of wafers. As a beta particle passes through, a bias applied between two enclosed electrodes generates electron cascades in the gas between them. This results in a current pulse or "count". A single die of 2 cm 2 had 6 independent chambers ranging in size from 8X 8 mm to 1X 3 mm. He, Ne, and a He/air mixture, which have different voltage bias requirements, are separately evaluated as background gases. Counting rates are lower in a Ne background gas than in He, but Ne is more suitable for packaging. In tests the device was found to detect incident beta particles from a Uranium-238 source. Counting rates of up to 22 counts/min were measured. As with conventional Geiger counters, the rates varied inversely with distance from the source. The microGeiger was tested with pure He and Ne background gas with 90 Sr, 60 Co, and 204 Tl, all beta emitting isotopes. Rates up to 24 counts/min. were measured.

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