High precision optical surface sensor

Kohno, Tsuguo; Ozawa, Norimitsu; Miyamoto, Kozo; Musha, Tohru

doi:10.1364/ao.27.000103

Cited by 102 publications

(21 citation statements)

References 11 publications

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“…2). Stylus profilometry techniques (based on either mechanical tracing systems or optical probes) are widely used in assessing surface textures [12], and several references can be found in the literature covering this topic, namely with applications in the areas of bioengineering and machine finishing [13][14][15][16]. As far as paper is concerned, these evaluation techniques are becoming also popular, although their use in this field is not yet fully explored.…”

Section: Measurement Devicementioning

confidence: 99%

Paper superficial waviness: Conception and implementation of an industrial statistical measurement system

Costa

Angélico

Reis

et al. 2005

Analytica Chimica Acta

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The development of proper measurement methodologies for product evaluation is a critical issue to papermakers since their customers are increasingly demanding in regard to new product development and product quality.This paper addresses the conception of a measurement system to assess objectively and systematically paper superficial waviness in industrial practice. Such a system is based on mechanical stylus profilometry. The measurement system conception process is presented in this article, considering all of its stages: (i) gage selection and auxiliary components creation, (ii) drawing of a measurement procedure, (iii) assessment of the system capacities (through a repeatability and reproducibility (R&R) study), (iv) design of an appropriate categorical scale for paper waviness classification, and (v) validation of the classification model.The definition of the categorical scale encompassed the sensorial and instrumental characterization of several sheets of paper. The corresponding classification model strongly relies on the quality of judgments made by a panel of experts, and therefore the definition of a golden standard was carefully conducted. Two distinctive methodologies were used to assess the perceptiveness of the judges regarding paper superficial waviness, and linear discriminant analysis with stepwise variable selection for dimensional reduction was then applied to build a final classification model.The system conceived can be very helpful in the field of product design and process development, besides its obvious application to the monitoring of paper superficial quality. In fact, it can play an important role as an instrument used to define process-structure and structure-properties relationships, which may help in achieving faster product design time cycles.

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Section: Measurement Devicementioning

confidence: 99%

Paper superficial waviness: Conception and implementation of an industrial statistical measurement system

Costa

Angélico

Reis

et al. 2005

Analytica Chimica Acta

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show abstract

“…Several optical principles are currently being considered for the optical head, including critical angle autofocus 15 , differential confocal 16 and absolute interferometry 17 . The long stroke measurement The optical head will be mounted onto either an elastic or airbearing linear guidance, and will be servo controlled to maintain focus onto the surface.…”

Section: Non-contact Probe Designmentioning

confidence: 99%

Design of a machine for the universal non-contact measurement of large free-form optics with 30 nm uncertainty

et al. 2005

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A new universal non-contact measurement machine design for measuring free-form optics with 30 nm expanded uncertainty is presented. In the cylindrical machine concept, an optical probe with 5 mm range is positioned over the surface by a motion system. Due to a 2 nd order error effect when measuring smoothly curved surfaces, only 6 position measurement errors are critical (nanometer level). A separate metrology system directly measures these critical errors of the probe and the product relative to a metrology frame, circumventing most stage errors. An uncertainty estimation has been performed for the presented design, including a calibration uncertainty estimation and a dynamic analysis. Machine dynamics certainly cause relative motion between probe and product, but due to the non-contact nature of the measurement and the short metrology loop, these motions do not cause significant measurement errors. The resulting shape measurement error for aspheres up to medium free-forms is between 24 and 37 nm, and 30 -85 nm for medium to heavily free-form surfaces. The suitability of the proposed design is herewith confirmed. A detailed design and a prototype of the machine are currently being developed.

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“…Optical methods adopt light triangulation [2], light sectioning [3], light scattering [4][5][6], or a laser speckle and fibre optic sensor [7,8] to measure surface roughness parameter of the engineering surfaces. Machine vision techniques are employed for acquiring the image of the machined surfaces and to analyze the image for prediction of surface parameters.…”

Section: Introductionmentioning

confidence: 99%

Measurement, Modeling and Evaluation of Surface Parameter Using Capacitive-Sensor-Based Measurement System

Murugarajan

Samuel²

2011

Metrology and Measurement Systems

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Surface roughness parameter prediction and evaluation are important factors in determining the satisfactory performance of machined surfaces in many fields. The recent trend towards the measurement and evaluation of surface roughness has led to renewed interest in the use of newly developed non-contact sensors. In the present work, an attempt has been made to measure the surface roughness parameter of different machined surfaces using a high sensitivity capacitive sensor. A capacitive response model is proposed to predict theoretical average capacitive surface roughness and compare it with the capacitive sensor measurement results. The measurements were carried out for 18 specimens using the proposed capacitive-sensor-based non-contact measurement setup. The results show that surface roughness values measured using a sensor well agree with the model output. For ground and milled surfaces, the correlation coefficients obtained are high, while for the surfaces generated by shaping, the correlation coefficient is low. It is observed that the sensor can effectively assess the fine and moderate rough-machined surfaces compared to rough surfaces generated by a shaping process. Furthermore, a linear regression model is proposed to predict the surface roughness from the measured average capacitive roughness. It can be further used in on-machine measurement, on-line monitoring and control of surface roughness in the machine tool environment.

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High precision optical surface sensor

Cited by 102 publications

References 11 publications

Paper superficial waviness: Conception and implementation of an industrial statistical measurement system

Paper superficial waviness: Conception and implementation of an industrial statistical measurement system

Design of a machine for the universal non-contact measurement of large free-form optics with 30 nm uncertainty

Measurement, Modeling and Evaluation of Surface Parameter Using Capacitive-Sensor-Based Measurement System

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