High-Precision Force Control of Short-Stroke Reluctance Actuators with an Air Gap Observer

Katalenic, A Andelko; Butler, Hans; Bosch, P.P.J. van den

doi:10.1109/tmech.2016.2569023

Cited by 34 publications

(7 citation statements)

References 13 publications

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“…In these studies, different linearisation techniques were proposed to linearise the dynamic behaviour of the reluctance actuator. These techniques include current‐biased linearisation [15], flux‐biased linearisation via a permanent magnet [16], linearisation via increasing the nominal operating gap [17], linearisation via feedback control of the voltage‐driven reluctance actuator [18], and linearisation via feedforward of the current‐driven reluctance actuator [19].…”

Section: Introductionmentioning

confidence: 99%

Design parameters of a reluctance actuation system for stable operation conditions with applications of high‐precision motions in lithography machines

Saaideh

Alatawneh

Janaideh

2021

IET Electric Power Appl

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Recently, the reluctance actuator has attracted great attention to replace the Lorentz actuator in the next generation of wafer scanners in semi‐conductor lithography machines. The reluctance actuator has a non‐linear position‐force characteristic, which may cause high oscillations and unstable operation. This study presents a linearisation technique by optimising the main parameters of the reluctance actuator to operate away from the saturation point. Also, in this study, the critical current is formulated for the stable dynamic behaviour of the reluctance actuator. Optimisation based on the Grey Wolf Optimiser is performed considering the high‐precision motion requirements and physical constraints. The high‐precision motion requirements include the desired work‐space displacement, natural frequency, and maximum force. The electromechanical dynamic model of the reluctance actuator motion system is formulated to characterise the interaction among electrical, magnetic, and mechanical parts. The simulation results show that the optimal design of the reluctance actuator works in the linear region, and for stable dynamic behaviour, the input current is limited by the critical current. Finally, a feedforward controller is designed based on the approximation of the force–current relationship to improve the tracking performances of the reluctance actuator motion system. The simulation results in time and frequency domains show an improvement in tracking performances using the feedforward controller.

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Section: Introductionmentioning

confidence: 99%

Design parameters of a reluctance actuation system for stable operation conditions with applications of high‐precision motions in lithography machines

Saaideh

Alatawneh

Janaideh

2021

IET Electric Power Appl

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“…This trade-off can be partially overcome by employing reluctance actuators. These actuators are characterized by a larger stroke as compared to piezoelectric actuators and a higher motor constant as compared to voice coil actuators [8]. Reluctance actuators are commonly used in several industrial applications, such as magnetic bearings [9] and linear stepper motors [10] and are recently attracting attention for use in high-precision scanning systems, such as linear nanopositioning stages [11] and scanning tip-tilt mirrors [12].…”

Section: Introductionmentioning

confidence: 99%

Multiphysics finite element model for the computation of the electro-mechanical dynamics of a hybrid reluctance actuator

Cigarini

Csencsics

Schlarp

et al. 2020

Mathematical and Computer Modelling of Dynamical Systems

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In hybrid reluctance actuators, the achievable closed-loop system bandwidth is affected by the eddy currents and hysteresis in the ferromagnetic components and the mechanical resonance modes. Such effects must be accurately predicted to achieve high performance via feedback control. Therefore, a multiphysics electromechanical finite element model is proposed in this paper to compute the dynamics of a 2-DoF hybrid reluctance actuator. An electromagnetic simulation is adopted to compute the electromagnetic dynamics and the actuation torque, which is employed as input for a structural dynamic simulation computing the electromechanical frequency response function. For model validation, the simulated and measured frequency response plots are compared for two actuators with solid and laminated outer yoke, respectively. In both cases, the model accurately predicts the measurement results, with a maximum relative phase error of 1.7% between the first resonance frequency and 1 kHz and a relative error of 1.5% for the second resonance frequency..

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“…Reluctance actuators are being increasingly used in several domains because of their force density, fast response and efficiency [1]. These features cause this type of actuators to be the ideal solution for novel high precision devices, e.g., antivibration systems for vehicles [2] or aeronautical applications [3], and may even make them advantageous with respect to classical induction motors [4].…”

Section: Introductionmentioning

confidence: 99%

Hybrid Dynamical Model for Reluctance Actuators Including Saturation, Hysteresis, and Eddy Currents

Ramirez-Laboreo

Roes

Sagüés

2019

IEEE/ASME Trans. Mechatron.

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A novel hybrid dynamical model for singlecoil, short-stroke reluctance actuators is presented in this paper. The model, which is partially based on the principles of magnetic equivalent circuits, includes the magnetic phenomena of hysteresis and saturation by means of the generalized Preisach model. In addition, the eddy currents induced in the iron core are also considered, and the flux fringing effect in the air is incorporated by using results from finite element simulations. An explicit solution of the dynamics without need of inverting the Preisach model is derived, and the hybrid automaton that results from combining the electromagnetic and motion equations is presented and discussed. Finally, an identification method to determine the model parameters is proposed and experimentally illustrated on a real actuator. The results are presented and the advantages of our modeling method are emphasized.

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High-Precision Force Control of Short-Stroke Reluctance Actuators with an Air Gap Observer

Cited by 34 publications

References 13 publications

Design parameters of a reluctance actuation system for stable operation conditions with applications of high‐precision motions in lithography machines

Design parameters of a reluctance actuation system for stable operation conditions with applications of high‐precision motions in lithography machines

Multiphysics finite element model for the computation of the electro-mechanical dynamics of a hybrid reluctance actuator

Hybrid Dynamical Model for Reluctance Actuators Including Saturation, Hysteresis, and Eddy Currents

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