High-Precision Cutting Edge Radius Measurement of Single Point Diamond Tools Using an Atomic Force Microscope and a Reverse Cutting Edge Artifact

Abstract

This paper presents a measurement method for high-precision cutting edge radius of single point diamond tools using an atomic force microscope (AFM) and a reverse cutting edge artifact based on the edge reversal method. Reverse cutting edge artifact is fabricated by indenting a diamond tool into a soft metal workpiece with the bisector of the included angle between the tool’s rake face and clearance face perpendicular to the workpiece surface on a newly designed nanoindentation system. An AFM is applied to measure the topographies of the actual and the reverse diamond tool cutting edges. With the proposed edge reversal method, a cutting edge radius can be accurately evaluated based on two AFM topographies, from which the convolution effect of the AFM tip can be reduced. The accuracy of the measurement of cutting edge radius is significantly influenced by the geometric accuracy of reverse cutting edge artifact in the proposed measurement method. In the nanoindentation system, the system operation is optimized for achieving high-precision control of the indentation depth of reverse cutting edFigurege artifact. The influence of elastic recovery and the AFM cantilever tip radius on the accuracy of cutting edge radius measurement are investigated. Diamond tools with different nose radii are also measured. The reliability and capability of the proposed measurement method for cutting edge radius and the designed nanoindentation system are demonstrated through a series of experiments.

Compensation Method for Correcting the Topography Convolution of the 3D AFM Profile Image of a Diffraction Grating

“…where R tool_m and R mark_m represent the measured apex radius of the indentation mark and measured cutting edge radius of the diamond tool, respectively. A description of the edge reversal method in detail can be found in the relevant papers [28,33]. As described above, the procedure of evaluating the tip shape of the AFM probe is complex and takes a lot of time in a single measurement.…”

“…The results obtained by molecular dynamics (MD) simulations indicated that elastic recovery of the indentation mark can be ignored when the indentation depth is greater than 200 nm. The principle of the ultra-precision nanoindentation instrument and the procedure for creating the indentation mark can be found in references [30,33] and will not be repeated in this paper for the sake of brevity.…”

“…The results obtained by molecular dynamics (MD) simulations indicated that elastic recovery of the indentation mark can be ignored when the indentation depth is greater than 200 nm. The principle of the ultra-precision nanoindentation instrument and the procedure for creating the indentation mark can be found in references [30,33] and will not be repeated in this paper for the sake of brevity. The AFM cantilever previously utilized for measuring the diffraction grating as described in Section 3.1 was also employed to measure the 3D profiles of the indentation mark and diamond tool.…”

Special Issue on Manufacturing Metrology

“…Another in situ measurement system dealing with the on-machine precision form truing of resin-bonded spherical diamond wheels was also proposed [15]. A novel nanotechnology presented a method for measuring the high-precision cutting edge radius of single point diamond tools using an atomic force microscope (AFM) and a reverse cutting edge artifact based on the edge reversal method [16]. For precision measurement of miniature internal structures with high aspect ratios, a spherical scattering electrical field probe (SSEP) was proposed based on charge signal detection.…”

An edge identification method for gap in-line measurement based on fillet assumption

“…The shape of an edge could be measured by optical method or even microscope, which is evaluated by the edge radius. 24 Zhang et al 25 proposed a measurement method for high-precision cutting edge radius of diamond tools by atomic force microscope. Song et al 26 proposed a new method for hard whirling tool edge reconstructing based on fractal interpolation, in which the edge radius is measured and reconstructed in a section.…”