High-precision and low-cost vibration generator for low-frequency calibration system

Li, Ruijun; Lei, Ying-Jun; Zhang, Liansheng; Chang, Zhen-Xin; Fan, Kuang‐Chao; Cheng, Zhihao; Hu, Penghao

doi:10.1088/1361-6501/aa9f6d

Cited by 20 publications

(8 citation statements)

References 12 publications

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“…The angle sensors were placed on a low-frequency vibration generator (shown in Figure 11). Vibrations were generated by this generator [20], which was driven by a high-precision waveform generator and a power amplifier. Vibration stability experiments were carried out with sine waves.…”

Section: Experiments and Resultsmentioning

confidence: 99%

Modeling and Optimal Design for a High Stability 2D Optoelectronic Angle Sensor

Cheng

Liu

et al. 2019

Sensors

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The structural deformations caused by environmental changes in temperature, vibration, and other factors are harmful to the stability of high precision measurement equipment. The stability and optimal design method of a 2D optoelectronic angle sensor have been investigated in this study. The drift caused by structural deformations of the angle sensor has been studied and a drift error model has been achieved. Key components sensitive to thermal and vibrational effects were identified by error sensitivity analysis and simulation. The mounts of key components were analyzed using finite element analysis software and optimized based on the concept of symmetric structures. Stability experiments for the original and optimized angle sensors have been carried out for contrast. As a result, the stability of the optimized angle sensor has been improved by more than 63%. It is verified that the modeling and optimal design method is effective and low-cost, which can also be applied to improve the stability of other sensors with much more complex principles and structures.

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Section: Experiments and Resultsmentioning

confidence: 99%

Modeling and Optimal Design for a High Stability 2D Optoelectronic Angle Sensor

Cheng

Liu

et al. 2019

Sensors

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“…To test the stability of the accelerometer’s output, repetitive tests were performed. A homemade high-performance vibration generator [ 31 ] is used to provide an acceleration excitation signal. The vibration generator can achieve steady output displacement with frequency range of 0.6–50 Hz, an analytical displacement resolution of 3.1 nm and an acceleration range of 0–1.93 m·s −2 .…”

Section: Experimental Setup and Measurement Resultsmentioning

confidence: 99%

Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

Lei

Chang

et al. 2018

Sensors

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Low-frequency vibration is a harmful factor that affects the accuracy of micro/nano-measuring machines. Low-frequency vibration cannot be completely eliminated by passive control methods, such as the use of air-floating platforms. Therefore, low-frequency vibrations must be measured before being actively suppressed. In this study, the design of a low-cost high-sensitivity optical accelerometer is proposed. This optical accelerometer mainly comprises three components: a seismic mass, a leaf spring, and a sensing component based on a four-quadrant photodetector (QPD). When a vibration is detected, the seismic mass moves up and down due to the effect of inertia, and the leaf spring exhibits a corresponding elastic deformation, which is amplified by using an optical lever and measured by the QPD. Then, the acceleration can be calculated. The resonant frequencies and elastic coefficients of various seismic structures are simulated to attain the optimal detection of low-frequency, low-amplitude vibration. The accelerometer is calibrated using a homemade vibration calibration system, and the calibration experimental results demonstrate that the sensitivity of the optical accelerometer is 1.74 V (m·s−2)−1, the measurement range of the accelerometer is 0.003–7.29 m·s−2, and the operating frequencies range of 0.4–12 Hz. The standard deviation from ten measurements is under 7.9 × 10−4 m·s−2. The efficacy of the optical accelerometer in measuring low-frequency, low-amplitude dynamic responses is verified.

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“…6 illustrates the experimental setup used for the calibration and test. In this arrangement, a homemade vibration generator [26] was used to provide excitation forces. A high-precision wave generator (Keysight 33519B, Keysight Technologies Co., Ltd. America) was used to generate excitation signals, which were then amplified by a homemade power amplifier base on PA94 (Apex Microtechnology Co., Ltd. America) (amplification factor is 15) to drive the vibration generator.…”

Section: Methodsmentioning

confidence: 99%

A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe

Chang

Lei

et al. 2019

IEEE Photonics J.

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A new micro accelerometer is proposed to measure and reduce low-frequency vibrations actively. It is mainly composed of a seismic mass, a leaf spring, and a focus probe modified from a digital versatile disc (DVD) pickup head. When a vibration occurs, the leaf spring will exhibit an elastic deformation; the seismic mass will move up and down due to the effect of inertia, whose displacement can be detected by the focus probe. Therefore, the measured acceleration can be obtained. The accelerometer was designed, and its proper parameters were obtained. The accelerometer was calibrated and tested using a high-precision vibration generator. The experimental results demonstrate that the proposed accelerometer has a sensitivity of 10.8 V/g, a resolution of 3.0 × 10 -4 g, and a working frequency range of 1-10 Hz. Also, the uncertainty of the accelerometer was analyzed in detail and an evaluation result of 7.0 × 10 -4 g (K = 2) was obtained. It can be used to detect the low-frequency microvibrations in high-precision measurement and machining fields.

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High-precision and low-cost vibration generator for low-frequency calibration system

Cited by 20 publications

References 12 publications

Modeling and Optimal Design for a High Stability 2D Optoelectronic Angle Sensor

Modeling and Optimal Design for a High Stability 2D Optoelectronic Angle Sensor

Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe

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