High performance silicon imaging arrays for cosmology, planetary sciences, &amp;amp; other applications

Nikzad, Shouleh; Hoenk, Michael E.; Hennessy, John; Jewell, April D.; Carver, Alexander G.; Jones, Todd J.; Cheng, Samuel R.; Goodsall, Timothy; Shapiro, Charles A.

doi:10.1109/iedm.2014.7047027

Cited by 3 publications

(3 citation statements)

References 15 publications

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“…3.7. 19,39 Fully fabricated wafers are bonded to a handle wafer and back-thinned to the epi-layer. The wafer then undergoes several surface preparation steps to ready the surface for 2D doping and optical coating processes.…”

Section: D Doping and End-to-end Processing Of Different Device Archi...mentioning

confidence: 99%

High-efficiency UV/optical/NIR detectors for large aperture telescopes and UV explorer missions: development of and field observations with delta-doped arrays

Nikzad

Jewell

Hoenk

et al. 2017

J. Astron. Telesc. Instrum. Syst

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A number of exciting concepts are under development for Flagship, Probe class, Explorer class, and Suborbital class NASA missions in the ultraviolet/optical spectral ranges. These missions will depend on high performance silicon detector arrays being delivered affordably and in high numbers. In a focused effort we have advanced delta-doping technology to high throughput and high yield wafer-scale processing, encompassing a multitude of state-of-the-art silicon-based detector formats and designs. As part of this technology advancement and in preparation for upcoming missions, we have embarked on a number of field observations, instrument integrations, and independent evaluations of delta-doped arrays. In this paper, we present recent data and innovations from the Advanced Detectors and Systems program at JPL, including two-dimensional doping technology; our end-to-end postfabrication processing of high performance UV/Optical/NIR arrays; and advanced coatings for detectors and optical elements. Additionally, we present examples of past, in-progress, and planned observations and deployments of deltadoped arrays.

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Section: D Doping and End-to-end Processing Of Different Device Archi...mentioning

confidence: 99%

High-efficiency UV/optical/NIR detectors for large aperture telescopes and UV explorer missions: development of and field observations with delta-doped arrays

Nikzad

Jewell

Hoenk

et al. 2017

J. Astron. Telesc. Instrum. Syst

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“…However, planar SPADs have worse flexibility because of the lack of silicon islands. Passivation technology [29] to filter out the defects around the trenches needs to be investigated in future work. …”

Section: Comparison Between Flexible Trench-isolated Spad and Planar mentioning

confidence: 99%

Flexible ultrathin-body single-photon avalanche diode sensors and CMOS integration

Sun¹,

Ishihara²,

Charbon³

2016

Opt. Express

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Abstract:We proposed the world's first flexible ultrathin-body singlephoton avalanche diode (SPAD) as photon counting device providing a suitable solution to advanced implantable bio-compatible chronic medical monitoring, diagnostics and other applications. In this paper, we investigate the Geiger-mode performance of this flexible ultrathin-body SPAD comprehensively and we extend this work to the first flexible SPAD image sensor with in-pixel and off-pixel electronics integrated in CMOS. Experimental results show that dark count rate (DCR) by band-to-band tunneling can be reduced by optimizing multiplication doping. DCR by trap-assisted avalanche, which is believed to be originated from the trench etching process, could be further reduced, resulting in a DCR density of tens to hundreds of Hertz per micrometer square at cryogenic temperature. The influence of the trench etching process onto DCR is also proved by comparison with planar ultrathin-body SPAD structures without trench. Photon detection probability (PDP) can be achieved by wider depletion and drift regions and by carefully optimizing body thickness. PDP in frontside-(FSI) and backside-illumination (BSI) are comparable, thus making this technology suitable for both modes of illumination. Afterpulsing and crosstalk are negligible at 2µs dead time, while it has been proved, for the first time, that a CMOS SPAD pixel of this kind could work in a cryogenic environment. By appropriate choice of substrate, this technology is amenable to implantation for biocompatible photon-counting applications and wherever bended imaging sensors are essential.

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“…Our post-fabrication process flow has been described elsewhere. 10 Briefly, device wafers are bonded front-side down to a handle wafer (Novati Technologies, Inc.); this handle wafer serves to protect the VLSI fabricated circuitry and pixel structure, and also provides support for the device wafer during and after subsequent thinning steps. The device wafers are then thinned to remove the bulk of the detector substrate by grinding, chemical mechanical polishing, and chemical etching.…”

Section: Two-dimensional Dopingmentioning

confidence: 99%

Detector performance for the FIREBall-2 UV experiment

et al. 2015

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We present an overview of the detector for the upcoming Faint Intergalactic Red-shifted Emission Balloon (FIREBall-2) experiment, with a particular focus on the development of device-integrated optical coatings and detector quantum efficiency (QE). FIREBall-2 is designed to measure emission from the strong resonance lines of HI, OVI, and CIV, all red-shifted to 195-225 nm window; its detector is a delta-doped electron multiplying chargecoupled device (EM-CCD). Delta-doped arrays, invented at JPL, achieve 100% internal QE from the UV through the visible. External losses due to reflection (~70% in some UV regions) can be mitigated with antireflection coatings (ARCs). Using atomic layer deposition (ALD), thin-film optical filters are incorporated with existing detector technologies. ALD offers nanometer-scale control over film thickness and interface quality, allowing for precision growth of multilayer films. Several AR coatings, including single and multi-layer designs, were tested for FIREBall-2. QE measurements match modeled transmittance behavior remarkably well, showing improved performance in the target wavelength range. Also under development are ALD coatings to enhance QE for a variety of spectral regions throughout the UV (90-320 nm) and visible (320-1000 nm) range both for space-based imaging and spectroscopy as well as for ground-based telescopes.Keywords: Ultraviolet, EMCCD, AR coating, delta doping, FIREBall, atomic layer deposition FIREBALL-2The Faint Intergalactic Red Shifted Emission Balloon (FIREBall-2) is a balloon-borne UV spectrograph funded jointly by NASA and CNES. Briefly, FIREBall-2 is designed to observe emission from the circumgalactic medium (CGM), the diffuse gas around galaxies. The primary targets include line emission from HI (Lyman-α, 121.6 nm) at a redshift of z=0.7; OVI (103.3 nm) at z=1.0; and CIV (154.9 nm) at z=0.3. The instrument is optimized for narrowband observations spanning the stratospheric window (200-210 nm) centered at 205 nm. FIREBall-2 is a follow on to FIREBall-1, which was launched on two separate occasions in 2007 and 2009. [1][2][3][4] FIREBall-1 was a technical and engineering success, but elucidated the need for lower detection limits and FIREBall-2, resulting in changes to the spectrograph design and the detector. The focus of this manuscript is on the FIREBall-2 detector, specifically development of Electron Multiplying CCDs (EMCCDs) with unprecedented quantum efficiency (QE) within the FIREBall-2 observation band. Details of the spectrograph design and detector noise performance are provided elsewhere, including within these Proceedings. FIREBALL-2 DETECTORThe FIREBall-2 detector development is a collaborative effort shared between the Jet Propulsion Laboratory (JPL), the California Institute of Technology, and Columbia University. The detector is based on e2v's CCD201-20, an electron multiplying charge-coupled device (EMCCD). EMCCDs are conventional CCDs in which one of the register phases is replaced with a high voltage (40-50 V) gain register that multip...

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High performance silicon imaging arrays for cosmology, planetary sciences, & other applications

Cited by 3 publications

References 15 publications

High-efficiency UV/optical/NIR detectors for large aperture telescopes and UV explorer missions: development of and field observations with delta-doped arrays

High-efficiency UV/optical/NIR detectors for large aperture telescopes and UV explorer missions: development of and field observations with delta-doped arrays

Flexible ultrathin-body single-photon avalanche diode sensors and CMOS integration

Detector performance for the FIREBall-2 UV experiment

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