Single-photon avalanche diode (SPAD) arrays are solid-state detectors that offer imaging capabilities at the level of individual photons, with unparalleled photon counting and time-resolved performance. This fascinating technology has progressed at a very fast pace in the past 15 years, since its inception in standard CMOS technology in 2003. A host of architectures have been investigated, ranging from simpler implementations, based solely on off-chip data processing, to progressively “smarter” sensors including on-chip, or even pixel level, time-stamping and processing capabilities. As the technology has matured, a range of biophotonics applications have been explored, including (endoscopic) FLIM, (multibeam multiphoton) FLIM-FRET, SPIM-FCS, super-resolution microscopy, time-resolved Raman spectroscopy, NIROT and PET. We will review some representative sensors and their corresponding applications, including the most relevant challenges faced by chip designers and end-users. Finally, we will provide an outlook on the future of this fascinating technology.

Abstract-The design and characterization of an imaging system is presented for depth information capture of arbitrary three-dimensional (3-D) objects. The core of the system is an array of 32 32 rangefinding pixels that independently measure the time-of-flight of a ray of light as it is reflected back from the objects in a scene. A single cone of pulsed laser light illuminates the scene, thus no complex mechanical scanning or expensive optical equipment are needed. Millimetric depth accuracies can be reached thanks to the rangefinder's optical detectors that enable picosecond time discrimination. The detectors, based on a single photon avalanche diode operating in Geiger mode, utilize avalanche multiplication to enhance light detection. On-pixel high-speed electrical amplification can therefore be eliminated, thus greatly simplifying the array and potentially reducing its power dissipation. Optical power requirements on the light source can also be significantly relaxed, due to the array's sensitivity to single photon events. A number of standard performance measurements, conducted on the imager, are discussed in the paper. The 3-D imaging system was also tested on real 3-D subjects, including human facial models, demonstrating the suitability of the approach.

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A fault-tolerant quantum computer with millions of quantum bits (qubits) requires massive yet very precise control electronics for the manipulation and readout of individual qubits. CMOS operating at cryogenic temperatures down to 4 K (cryo-CMOS) allows for closer system integration, thus promising a scalable solution to enable future quantum computers. In this paper, a cryogenic control system is proposed, along with the required specifications, for the interface of the classical electronics with the quantum processor. To prove the advantages of such a system, the functionality of key circuit blocks is experimentally demonstrated. The characteristic properties of cryo-CMOS are exploited to design a noise-canceling low-noise amplifier for spin-qubit RF-reflectometry readout and a class-F 2,3 digitally controlled oscillator required to manipulate the state of qubits.

We present the first 1Mpixel SPAD camera ever reported. The camera features 3.8ns time gating and 24kfps frame rate; it was fabricated in 180nm CIS technology. Two pixels have been designed with a pitch of 9.4µm in 7T and 5.75T configurations, respectively, achieving a maximum fill factor of 13.4%. The maximum PDP is 27%, median DCR 2.0cps, variation in gating length 120ps, position skew 410ps, and rise/fall time <550ps, all FWHM at 3.3V of excess bias. The sensor was used to capture 2D/3D scenes over 2m with an LSB of 5.4mm and a precision better than 7.8mm. Extended dynamic range is demonstrated in dual exposure operation mode. Spatially overlapped multi-object detection is experimentally demonstrated in single-photon time-gated ToF for the first time.

We report on SwissSPAD2, an image sensor with 512×512 photon-counting pixels, each comprising a single-photon avalanche diode (SPAD), a 1-bit memory, and a gating mechanism capable of turning the SPAD on and off, with a skew of 250ps and 344ps, respectively, for a minimum duration of 5.75ns. The sensor is designed to achieve a frame rate of up to 97,700 binary frames per second and sub-40ps gate shifts. By synchronizing it with a pulsed laser and using multiple successive overlapping gates, one can reconstruct a molecule’s fluorescent response with picosecond temporal resolution. Thanks to the sensor’s number of pixels (the largest to date) and the fully integrated gated operation, SwissSPAD2 enables widefield FLIM with an all-solid-state solution and at relatively high frame rates. This was demonstrated with preliminary results on organic dyes and semiconductor quantum dots using both decay fitting and phasor analysis. Furthermore, pixels with an exceptionally low dark count rate and high photon detection probability enable uniform and high quality imaging of biologically relevant fluorescent samples stained with multiple dyes. While future versions will feature the addition of microlenses and optimize firmware speed, our results open the way to low-cost alternatives to commercially available scientific time-resolved imagers.

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