“…On the standard GaAs (100) substrates, several techniques have been developed to improve the quality, such as anion exchange (Sb soaking) [12][13][14] and/or two-step growth (temperature variation). 7,[15][16][17][18] It has been reported that most of the dislocations induced by the lattice mismatch could be confined at the interface of InSb/GaAs by utilizing these growth technique, 16) and that high mobility characteristics have been realized in relatively thick InSb layers grown on GaAs(100). 8,15,18,19) However, three-dimensional islands are often formed at the initial stage of the InSb growth, which degrade the structural and electrical properties of thinner InSb films.…”