2008
DOI: 10.1002/adma.200800032
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High‐Performance Microring Resonators Fabricated with Multiphoton Absorption Polymerization

Abstract: The fabrication of high‐performance polymeric optical devices is demonstrated using multiphoton absorption polymerization (MAP). Supported waveguides with micrometer‐scale diameters sustain high‐quality modes with low loss. The performance of microring resonators created with MAP is comparable to that of devices created using more conventional lithographic techniques, but opens the door to the creation of devices with unique architectures.

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Cited by 30 publications
(32 citation statements)
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“…In fact polymers can be synthesized with well controlled and broadly tunable chemophysical properties [106]. They are often easy to mold and polymeric photonic circuits can be fabricated with a number of different technologies (optical lithography [107,108], imprinting/embossing [109,110], and photoreaction and nonlinear optical induced polymerization [111] to cite the most investigated ones). In the last years polymeric materials were integrated into nanophotonic devices to exploit their peculiar properties, in particular their highly nonlinear optical coefficient.…”
Section: Polymers In Silicon Photonicsmentioning
confidence: 99%
“…In fact polymers can be synthesized with well controlled and broadly tunable chemophysical properties [106]. They are often easy to mold and polymeric photonic circuits can be fabricated with a number of different technologies (optical lithography [107,108], imprinting/embossing [109,110], and photoreaction and nonlinear optical induced polymerization [111] to cite the most investigated ones). In the last years polymeric materials were integrated into nanophotonic devices to exploit their peculiar properties, in particular their highly nonlinear optical coefficient.…”
Section: Polymers In Silicon Photonicsmentioning
confidence: 99%
“…More recently, high-performance microring resonators ( Fig. 5.7 ) have been demonstrated (Li et al , 2008a), in addition to index-modulated gratings within waveguides . Dielectric-loaded waveguides based on plasmonic metals are beginning to be explored as well (Reinhardt et al , 2009.…”
Section: Waveguide-based Devicesmentioning
confidence: 99%
“…(b) Typical data from the through port of a microring resonator (both reprinted with permission fromLi et al , 2008a).…”
mentioning
confidence: 99%
“…In 2008, Li et al demonstrated that high‐performance polymeric microrings can be directly written via multiphoton absorption polymerization . Since then, femtosecond laser fabrication methods, from two‐photon polymerization to femtosecond laser micromachining, as well as different materials and approaches have been exploited to obtain high‐Q WGM microresonators .…”
mentioning
confidence: 99%