2021
DOI: 10.1109/jphot.2021.3065223
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High-Performance GeSn Photodetector Covering All Telecommunication Bands

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Cited by 16 publications
(13 citation statements)
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“…Commonly used SWIR optoelectronic materials including InGaAs, HgCdTe, PbS, and mainstream InGaAs SWIR imaging chips have been commercially available for a long time. However, there are some technical difficulties, such as small substrate diameter, high wafer cost, expensive chip manufacturing cost, low yield rate, and toxicity. , In addition, these SWIR chips are not compatible with the CMOS process production lines, which require a separate production line to avoid inevitable contamination. Group IV Ge (Sn) semiconductor material was regarded as one of the most promising candidates to overturn the current SWIR imaging technology due to their excellent photoelectric response in the SWIR band and compatibility with the standard CMOS process, thereby making Ge an ideal absorption layer for the high-performance SWIR photodetectors. …”
Section: Introductionmentioning
confidence: 99%
“…Commonly used SWIR optoelectronic materials including InGaAs, HgCdTe, PbS, and mainstream InGaAs SWIR imaging chips have been commercially available for a long time. However, there are some technical difficulties, such as small substrate diameter, high wafer cost, expensive chip manufacturing cost, low yield rate, and toxicity. , In addition, these SWIR chips are not compatible with the CMOS process production lines, which require a separate production line to avoid inevitable contamination. Group IV Ge (Sn) semiconductor material was regarded as one of the most promising candidates to overturn the current SWIR imaging technology due to their excellent photoelectric response in the SWIR band and compatibility with the standard CMOS process, thereby making Ge an ideal absorption layer for the high-performance SWIR photodetectors. …”
Section: Introductionmentioning
confidence: 99%
“…Moreover, GeSn alloys show bandgap tunability, a high carrier saturation velocity [ 9 ], high carrier mobility [ 10 ], and a large absorption coefficient [ 11 ]. These unique characteristics have encouraged the development of efficient GeSn-based SWIR and MIR PDs [ 8 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 ]. Furthermore, a special momentum (k)-space carrier separation scheme enhances the optical performance of the GeSn PDs [ 18 ].…”
Section: Introductionmentioning
confidence: 99%
“…Developing high-speed photodetectors (PDs) operating at room temperature in the extended-SWIR (e-SWIR) spectral range is critical to implement a variety of applications including high-resolution active light detection and ranging (LIDAR), time-resolved spectroscopy, environmental monitoring of greenhouse gases, medical optical tomography, and new generation optical communication systems. While group IV detectors operating at 2 μm provide a bandwidth reaching 30 GHz, , the state-of-the-art photodetectors operating above 2.3 μm with a bandwidth above 5 GHz consist exclusively of In-rich InGaAs on InP, InGaAs/GaAsSb on InP, and GaInAsSb on GaSb. , These devices face cost and scalability challenges and exhibit a low bandwidth above 2.3 μm that does not exceed 6 GHz . Establishing silicon-integrated high-speed detectors is an attractive paradigm for large-scale fabrication, cost effectiveness, and compatibility with complementary metal-oxide semiconductor (CMOS) processing .…”
Section: Introductionmentioning
confidence: 99%