2019
DOI: 10.1109/jsen.2019.2904517
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High-Performance Dual-Gate Carbon Nanotube Ion-Sensitive Field Effect Transistor With High-$\kappa$ Top Gate and Low-$\kappa$ Bottom Gate Dielectrics

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Cited by 12 publications
(5 citation statements)
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References 34 publications
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“…reported the fabrication and characterization of dual‐gate CNT‐ISFET for pH detection. [ 86 ] It showed a super‐Nernstian sensitivity of 943 mV/pH and a suppressed drift rate down to 13.5 mV/pH. Besides, CNTs can also serve as crosslinking material for the ionophore membranes.…”
Section: Gate Materialsmentioning
confidence: 99%
“…reported the fabrication and characterization of dual‐gate CNT‐ISFET for pH detection. [ 86 ] It showed a super‐Nernstian sensitivity of 943 mV/pH and a suppressed drift rate down to 13.5 mV/pH. Besides, CNTs can also serve as crosslinking material for the ionophore membranes.…”
Section: Gate Materialsmentioning
confidence: 99%
“…20,57 To address this limitation, numerous studies have been conducted to enhance the sensitivity of ISFETs. [107][108][109][110][111][112][113] A higher sensitivity device is always desirable for both in-vivo and in-vitro systems. Several factors influence the sensitivity of a pH ISFET, including biorecognition layer and the transducer, 7 sensing channel material, 8 resident of hydroxyl group, measuring process and time, 114 processing parameters such as gas flow ratio, 115 fabrication process, 8,[114][115][116][117][118][119] pH sensor and interface unit, 117 parasitic effects (transconductance), 118 total surface-site density (N S ), 34,120,121 presence of oxygen on the surface and hydrogen content in silicon nitride sensitive films, 122 annealing conditions, 115,123 dielectric constant, 123,124 biasing regime of sensors and electrostatic screening of the analyte charges, 125 leakage current, 126,127 drift, 101,[128][129][130] depletion width, 131 capacitance of floating diffusion (FD), 132 scale length with gate oxide thickness.…”
Section: Review Of Literaturementioning
confidence: 99%
“…Metal Al has been used to form the source (S) and drain (D) contact regions on the top of the CNT layer. The details of fabrication process of these layers and contacts can be obtained in our earlier publications [12], [13]. Referring to the nanocomposite K/PPy/CNT layer, a solution has been first prepared by adding two ml of (1.0 M) KOH solution (potassium cannot be directly doped as it is unstable in air and very reactive with water) to 10 ml of CNT solution.…”
Section: A Fabricationmentioning
confidence: 99%