2018 48th European Microwave Conference (EuMC) 2018
DOI: 10.23919/eumc.2018.8541622
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High Performance and Low Energy Consumption in Phase Change Material RF Switches

Abstract: This paper presents a RF to mm-wave switch based on Germanium Telluride phase change material. An integration process compatible with a standard CMOS back end of line is proposed to realize directly heated switches. RF measurements, performed up to 65 GHz, show an ON-state resistance of 1 Ω with an OFF-state capacitance of 7 fF corresponding to a 22 THz cutoff frequency which constitutes a state-of-the-art Figure-of-Merit. Switching time of only 60 ns in both phase changes allow energy consumption one decade l… Show more

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Cited by 8 publications
(1 citation statement)
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“…GeTe (Germanium Telluride) is selected due to its advantages at high frequencies such as stability and power handling capabilities. The proposed GeTe switch technology was previously developed in [9]. Here, an optimized design is presented to be compatible with the Dband unit cell requirements.…”
Section: Introductionmentioning
confidence: 99%
“…GeTe (Germanium Telluride) is selected due to its advantages at high frequencies such as stability and power handling capabilities. The proposed GeTe switch technology was previously developed in [9]. Here, an optimized design is presented to be compatible with the Dband unit cell requirements.…”
Section: Introductionmentioning
confidence: 99%