2007 International Workshop on Electron Devices and Semiconductor Technology (EDST) 2007
DOI: 10.1109/edst.2007.4289782
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High Performance 4H-SiC MESFETs with a Source Field Plated Structure

Abstract: A new structure of 4H-SiC MESFET based on the source field plate technology is proposed in this paper. The source field plate has been applied not only to improve the breakdown voltage, but also to eliminate the drawback of low gain characteristics relatively resulted from additional feedback capacitance associated with the field plate electrode. The off-state breakdown voltage was significantly improved by employing source field plate electrode, and the highest of 203V was obtained. As compared to the convent… Show more

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Cited by 4 publications
(1 citation statement)
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“…It has allowed to enhance the breakdown voltage in AlGaN/GaN HEMTs [3], [4], to reduce the current collapse phenomena, resulting in a better on-resistance [5], and to increase the maximum available gain, lowering the drainto -gate feedback parasitic capacitance (C gd ) in MESFETs [6].…”
Section: Introductionmentioning
confidence: 99%
“…It has allowed to enhance the breakdown voltage in AlGaN/GaN HEMTs [3], [4], to reduce the current collapse phenomena, resulting in a better on-resistance [5], and to increase the maximum available gain, lowering the drainto -gate feedback parasitic capacitance (C gd ) in MESFETs [6].…”
Section: Introductionmentioning
confidence: 99%