High numerical aperture planar microlens with swelled structure

Oikawa, Masahiro; Nemoto, Hiroyuki; Hamanaka, Kenjiro; Okuda, Eiji

doi:10.1364/ao.29.004077

Cited by 23 publications

(3 citation statements)

References 2 publications

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“…The experimental EFL values for both the 40 µm and 60 µm diameter microlenses were within the simulated upper and lower EFL bounds. The numerical aperture (NA) of the microlenses (for use in air) was estimated from [29] where a and F represent the microlens radius and EFL respectively.…”

Section: Resultsmentioning

confidence: 99%

A high numerical aperture, polymer-based, planar microlens array

Chokshi¹,

Chronis²

2009

Opt. Express

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We present a novel microfabrication approach for obtaining arrays of planar, polymer-based microlenses of high numerical aperture. The proposed microlenses arrays consist of deformable, elastomeric membranes that are supported by polymer-filled microchambers. Each membrane/microchamber assembly is converted into a solid microlens when the supporting UV-curable polymer is pressurized and cured. By modifying the microlens diameter (40-60 microm) and curing pressure (7.5-30 psi), we demonstrated that it is possible to fabricate microlenses with a wide range of effective focal lengths (100-400 microm) and numerical apertures (0.05-0.3). We obtained a maximum numerical aperture of 0.3 and transverse resolution of 2.8 microm for 60 microm diameter microlenses cured at 30 psi. These values were found to be in agreement with values obtained from opto-mechanical simulations. We envision the use of these high numerical microlenses arrays in optical applications where light collection efficiency is important.

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Section: Resultsmentioning

confidence: 99%

A high numerical aperture, polymer-based, planar microlens array

Chokshi¹,

Chronis²

2009

Opt. Express

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“…The second array consists of 85 µm diameter microlenses with a focal length of 115 µm (see figure 4(b)). The latter microlenses are also fabricated with ion exchange but an additional curvature is created on 100 µm the surface by swelling each lenslet to increase its numerical aperture [30]. This swelling is mainly caused by the use of a different type of ions, which occupy a larger volume.…”

Section: Gradient-index Microlensesmentioning

confidence: 99%

Comparing glass and plastic refractive microlenses fabricated with different technologies

Ottevaere¹,

Cox²,

Herzig³

et al. 2006

J. Opt. A: Pure Appl. Opt.

166

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We review the most important fabrication techniques for glass and plastic refractive microlenses and we quantitatively characterize in a systematic way the corresponding state-of-the-art microlenses, which we obtained from selected research groups. For all our measurements we rely on three optical instruments: a non-contact optical profiler, a transmission Mach-Zehnder interferometer and a Twyman-Green interferometer. To conclude, we survey and discuss the different fabrication techniques by comparing the geometrical and optical characteristics of the microlenses, the range of materials in which the lenses can be produced, their potential for low-cost fabrication through mass-replication techniques and their suitability for monolithic integration with other micro-optical components.

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“…In exchanging process, exchanging temperature is among 480℃~500℃ [10] , the diffusion time was chosen enough to realize a semi-sphere zone with gradient refractive index [11] . Numerical aperture and focal length can be controlled by changing ion-exchanging time.…”

Section: Ion Exchange Process Theory Analysismentioning

confidence: 99%

Spherical aberration of planar square aperture microlens array

Chen

Zhang

Zhao

et al. 2011

International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies

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Ion thermal diffusion theory was applied to analyze the influence on numerical aperture and focal length of planar square aperture microlens array (PMLA). Moreover, numerical aperture and focal length with different ion-exchanging time but the same size of mask aperture were measured experimentally. Then, we measured the longitudinal and transverse spherical aberration by the method of parallel light incidence and emergent light pupil and improved the aberration of square-aperture PMLA by annealing treatment. Experiment results show that the spherical aberration is decreased obviously after annealing process. Meanwhile, imaging resolution is also improved more greatly. PMLA optical system with continuously adjustable focal length was proposed, which was made up of two pieces of square aperture PMLA and an aspherical lens and focal length can be adjusted continuously just by precisely adjusting the distance between the two pieces of square aperture PMLA.

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High numerical aperture planar microlens with swelled structure

Cited by 23 publications

References 2 publications

A high numerical aperture, polymer-based, planar microlens array

A high numerical aperture, polymer-based, planar microlens array

Comparing glass and plastic refractive microlenses fabricated with different technologies

Spherical aberration of planar square aperture microlens array

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