High Gain Microchannel Plates

Henkel, P. R.; Roy, Ray; Wiza, Joseph Ladislas

doi:10.1109/tns.1978.4329368

Cited by 13 publications

(2 citation statements)

References 5 publications

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“…20 For a given MCP bias and ion mass, the ion impact kinetic energy has been shown to have the most significant effect on MCP detection efficiency. 18,19,21 The detection efficiency has also been observed to increase with incident ion kinetic energy 21,22 up to saturation (the level at which saturation occurs is dependent on MCP bias and ion mass [22][23][24] ). Consequently, the detection efficiency of the MCP's must be taken into account in order to accurately investigate the ion energy distribution.…”

Section: Methodsmentioning

confidence: 99%

Angular and energy distribution of Sn ion debris ejected from a laser-produced plasma source, for laser power densities in the range suitable for extreme ultraviolet lithography

O'Connor¹,

Morris²,

Sokell³

2011

Journal of Applied Physics

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In this paper, experimental results are presented for the spatial and energy distributions of charge-discriminated Sn ions ejected from laser-produced plasmas. The plasmas were formed on solid, planar Sn targets, irradiated with a Nd:YAG laser. Ions were investigated using a calibrated electrostatic sector analyzer, scanning an energy-to-charge ratio range of 0.22 to 2.2 keV/e for emission angles between 20 and 80 degrees relative to target normal. Results were obtained for three laser power densities, in the region suitable for inducing significant extreme ultraviolet emission, of the order 1.5–8.1 × 1011 W/cm2. The fully differentiated data were found to be well characterized by Gaussian fits, which allowed trends in the emission profiles to be readily quantified. Ions of set energy and charge were observed to possess a preferential angle of emission, the superposition of which yields a physical basis for the total angular emission observed previously and in this work. The experimental results obtained have been related to physical processes within the plasma that influence the energy and angle of ejection of ions from laser produced plasmas.

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Section: Methodsmentioning

confidence: 99%

Angular and energy distribution of Sn ion debris ejected from a laser-produced plasma source, for laser power densities in the range suitable for extreme ultraviolet lithography

O'Connor¹,

Morris²,

Sokell³

2011

Journal of Applied Physics

View full text Add to dashboard Cite

show abstract

“…For single particle detection, the output must not scale linearly with the input, and saturation is thus not an issue. For a single straight MCP, saturation occurs at gains of 10 4 -10 5 [82][83][84]. This gain is too low for many practical applications, which is why single photon or particle detectors typically employ either curved channels, or up to three straight channel MCPs in series.…”

Section: Microchannel Platesmentioning

confidence: 99%