Abstract:We have measured extreme ultraviolet (EUV)

The primary requirement for the development of tools for extreme ultraviolet lithography (EUVL) has been the identification and optimization of suitable sources. These sources must be capable of producing hundreds of watts of extreme ultraviolet (EUV) radiation within a wavelength bandwidth of 2% centred on 13.5 nm, based on the availability of Mo/Si multilayer mirrors (MLMs) with a reflectivity of ∼70% at this wavelength. Since, with the exception of large scale facilities, such as free electron lasers, such radiation is only emitted from plasmas containing moderately to highly charged ions, the source development prompted a large volume of studies of laser produced and discharge plasmas in order to identify which ions were the strongest emitters at this wavelength and the plasma conditions under which their emission was optimized. It quickly emerged that transitions of the type 4p64dn − 4p54dn+1 + 4dn−14f in the spectra of Sn IX to SnXIV were the best candidates and work is still ongoing to establish the plasma conditions under which their emission at 13.5 nm is maximized. In addition, development of other sources at 6.X nm, where X ∼ 0.7, has been identified as the wavelength of choice for so-called Beyond EUVL (BEUVL), based on the availability of La/B based MLMs, with theoretical reflectance approaching 80% at this wavelength. Laser produced plasmas of Gd and Tb have been identified as potential source elements, as n = 4 − n = 4 transitions in their ions emit strongly near this wavelength. However to date, the highest conversion efficiency (CE) obtained, for laser to BEUV energy emitted within the 0.6% wavelength bandwidth of the available mirrors is only 0.8%, compared with values of 5% for the 2% bandwidth relevant for the Mo/Si mirrors at 13.5 nm. This suggests a need to identify other potential sources or the selection of other wavelengths for BEUVL. This review deals with the atomic physics of the highly-charged ions relevant to EUV emission at these wavelengths. It considers the developments that have contributed to the realization of the 5% CE at 13.5 nm which underpins the production of high-volume lithography tools, and those that will be required to realize BEUV lithography.

Extreme-ultraviolet spectra of xenon ions have been recorded in the 4.5 to 20 nm wavelength region using an electron beam ion trap and a flat field spectrometer. The electron beam energy was varied from 180 eV to 8 keV and radiation from charge states Xe 6+ to Xe 43+ was observed. Our measured wavelengths were compared to atomic structure calculations using the Cowan suite of codes. We have measured seventeen previously unreported features corresponding to transitions in Xe 35+ through to Xe 41+ with estimated wavelength uncertainties of ±0.003 nm. It was found that for the case of continuous injection of neutral xenon gas a wide range of charge states were always present in the trap but this charge state distribution was greatly narrowed, towards higher charge states, if a sufficiently low gas injection pressure was employed. The energy dependence of spectral lines arising from Xe 42+ and Xe 43+ revealed enhancement of the total ionization cross sections, due to excitation-autoionization of n = 2 electrons to n = 3 levels, in the Xe 41+ and Xe 42+ charge states.

We publish three Roadmaps on photonic, electronic and atomic collision physics in order to celebrate the 60th anniversary of the ICPEAC conference. In Roadmap I, we focus on the light–matter interaction. In this area, studies of ultrafast electronic and molecular dynamics have been rapidly growing, with the advent of new light sources such as attosecond lasers and x-ray free electron lasers. In parallel, experiments with established synchrotron radiation sources and femtosecond lasers using cutting-edge detection schemes are revealing new scientific insights that have never been exploited. Relevant theories are also being rapidly developed. Target samples for photon-impact experiments are expanding from atoms and small molecules to complex systems such as biomolecules, fullerene, clusters and solids. This Roadmap aims to look back along the road, explaining the development of these fields, and look forward, collecting contributions from twenty leading groups from the field.

The radiative decay of (1)P(o) doubly excited states in helium has been investigated using a novel apparatus in which metastable atoms and vacuum ultraviolet photons are detected. The intensity ratio of the energetically narrow (sp,2n-)(1)P(o) and (2p,nd)(1)P(o) series to the broader (sp,2n+)(1)P(o) series is strikingly enhanced in comparison with conventional photoabsorption, photoion, or photoelectron measurements using synchrotron radiation. The experimental approach is a new way forward for the study of energetically narrow doubly excited states.