Proceedings of the 1995 IEEE International Frequency Control Symposium (49th Annual Symposium)
DOI: 10.1109/freq.1995.484090
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High frequency fundamental resonators and filters fabricated by batch process using chemical etching

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Cited by 15 publications
(4 citation statements)
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“…Resonators in the ultrahigh frequency (UHF) band are in the development stage for several manufacturers. [1][2][3][4] The vibrating area of a UHF AT-cut plate, which is usually fabricated with a chemical etching process, [1][2][3][4][5] is extremely thin, and the lateral dimension of the active area is very large compared with the plate thickness. The large length-to-thickness ratio of AT-cut plates normally produces an abundance of spurious resonances which belong to the flexural (F), extensional (E), and face-shear (FS) modes around the main TS response.…”
Section: Introductionmentioning
confidence: 99%
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“…Resonators in the ultrahigh frequency (UHF) band are in the development stage for several manufacturers. [1][2][3][4] The vibrating area of a UHF AT-cut plate, which is usually fabricated with a chemical etching process, [1][2][3][4][5] is extremely thin, and the lateral dimension of the active area is very large compared with the plate thickness. The large length-to-thickness ratio of AT-cut plates normally produces an abundance of spurious resonances which belong to the flexural (F), extensional (E), and face-shear (FS) modes around the main TS response.…”
Section: Introductionmentioning
confidence: 99%
“…However, such coupling phenomena have not been experimentally observed in fabricated UHF resonators. [1][2][3][4] To interpret this strange observation, we noticed two items: (1) Circuit theory demonstrates that, for two strongly coupled vibrations, two resonant frequencies on the real axis are combined into one frequency with increasing loss. 7) (2) An analysis assuming lossless UHF plates has found strong coupling between the TS and F or E modes.…”
Section: Introductionmentioning
confidence: 99%
“…A higher operating frequency is obtained using a thinner substrate (quartz), because the frequency of the resonator is inversely proportional to the thickness of the membrane. Quartz has been thinned by various techniques including wet etching, 3) plasma etching 4,5) and mechanical polishing. 6) Wet etching using a buffered HF solution is a method well-adapted for mass production while plasma etching provides high precision in controlling frequency.…”
Section: Introductionmentioning
confidence: 99%
“…Chemical etching techniques have been extensively investigated along with ion milling to obtain thinner regions [3][4][5][6][7][8][9][10][11]. Considerable effort has been directed towards chemical etching techniques that do not leave a crystal facet roughened surface and resonators are commercially available.…”
Section: Thin Crystal Platesmentioning
confidence: 99%