2022
DOI: 10.1109/jphot.2022.3140775
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High External Quantum Efficiency Green Light Emitting Diodes on Stress-Manipulated AlNO Buffer Layers

Abstract: We demonstrated high-brightness InGaN/GaN green light emitting diodes (LEDs) with ex-situ sputtered stressmanipulated AlNO buffer on 4-inch patterned sapphire substrates. The lattice constant of the AlNO buffer was adjusted by oxygen flow. As a result, the dislocation density and the in-plane compressive stress caused by lattice mismatch were greatly reduced, while the interface quality of the InGaN/GaN multiple quantum wells and the uniformity of the indium composition were greatly improved. At 20A/cm 2 , the… Show more

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Cited by 5 publications
(3 citation statements)
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“…[ 31 ] Wang et al developed ex situ sputtered AlNO buffer layer on PSS to enhance the green LED efficiency. [ 32 ] The lattice constant of AlNO can be tuned through adjusting oxygen flow. With suitable oxygen composition, TDD and compressive stress caused by lattice mismatch were greatly reduced, paving the way for stress manipulation combining buffer layer with PSS in long‐wavelength LEDs.…”
Section: Template For Long‐wavelength Led Growthmentioning
confidence: 99%
“…[ 31 ] Wang et al developed ex situ sputtered AlNO buffer layer on PSS to enhance the green LED efficiency. [ 32 ] The lattice constant of AlNO can be tuned through adjusting oxygen flow. With suitable oxygen composition, TDD and compressive stress caused by lattice mismatch were greatly reduced, paving the way for stress manipulation combining buffer layer with PSS in long‐wavelength LEDs.…”
Section: Template For Long‐wavelength Led Growthmentioning
confidence: 99%
“…One important feature for the III-N materials is that their thermal expansion coefficients and lattice constants are different in the different layers [50]. This leads to the so-called ''strain''…”
Section: Structure Description and Simulation Detailsmentioning
confidence: 99%
“…Color versions of one or more of the figures in this article are available online at http://ieeexplore.ieee.org backlight technology for LCD displays and visualization systems. Furthermore, quantum well GaN technology has shown great potential in areas such as lasers, optical communication, and biomedical applications [7], [8], [9], [10], [11], [12]. The presence of defects in quantum wells during the LED growth process can have a considerable impact on its light emission characteristics and current transmission properties, ultimately leading to LED malfunction.…”
Section: Introductionmentioning
confidence: 99%