“…4 that In 3d 5/2 , Ga 2p 3/2 , and Zn 2p 3/2 center peaks shift gradually to higher energy side with increasing oxygen pressure, and all the changes is less than 1 eV. This small change may be ascribed to the decrease in valence electron density, an increase in oxidation state, and/or a Fermi level shift in the band gap due to irradiation [23][24][25]. The atomic ratio of the film was further calculated.…”