1993
DOI: 10.1063/1.109775
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High electron mobility transistor based on a GaN-AlxGa1−xN heterojunction

Abstract: In this letter we report the fabrication and dc characterization of a high electron mobility transistor (HEMT) based on a n-GaN-Al0.14Ga0.86N heterojunction. The conduction in our low pressure metalorganic chemical vapor deposited heterostructure is dominated by two-dimensional electron gas at the heterostructure interface. HEMT devices were fabricated on ion-implant isolated mesas using Ti/Au for the source drain ohmic and TiW for the gate Schottky. For a device with a 4 μm gate length (10 μm channel opening,… Show more

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Cited by 756 publications
(148 citation statements)
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“…10 The charge transfer process is a widely recognized phenomenon in organic and inorganic thin film interfaces with appropriate band energy alignment. [11][12][13] However, its influence on the properties of 1D nanostructures has not been well studied. Thus far, in 1D nanostructures it has only been revealed that F4-TCNQ coating is effective in reducing the contact and channel resistance in carbon nanotube transistors.…”
mentioning
confidence: 99%
“…10 The charge transfer process is a widely recognized phenomenon in organic and inorganic thin film interfaces with appropriate band energy alignment. [11][12][13] However, its influence on the properties of 1D nanostructures has not been well studied. Thus far, in 1D nanostructures it has only been revealed that F4-TCNQ coating is effective in reducing the contact and channel resistance in carbon nanotube transistors.…”
mentioning
confidence: 99%
“…The HEMTs uses the concept of bandgap engineering and it shows outstanding electron transport characteristics of two dimensional electron gas systems in III-V compound semiconductors. Over the last three decades, HEMTs have been demonstrated in several material systems such as AlGaAs/GaAs, AlGaN/GaN [203,204] and InAlAs/InGaAs [205,206]. HEMTs are mainly available in three flavors-pseudomorphic HEMT (pHEMT), Fig.…”
Section: Developments In Indium Phosphide Hemtsmentioning
confidence: 99%
“…All of these make it a strong candidate for high power and high temperature electronic applications such as electric substrates [1] , heat sinks, laser heat spreaders [2] and field-effect transistors [3] . Its ternary systems consisting of InN and GaN can be designed from 1.9 eV to 6.2 eV, which is suitable for electroluminescence devices operating at wavelengths from orange to ultraviolet.…”
Section: Introductionmentioning
confidence: 99%