2023
DOI: 10.1364/prj.488970
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High-efficiency reflector-less dual-level silicon photonic grating coupler

Abstract: We present the design and experimentally demonstrate a dual-level grating coupler with subdecibel efficiency for a 220 nm thick silicon photonics waveguide which was fabricated starting from a 340 nm silicon-on-insulator wafer. The proposed device consists of two grating levels designed with two different linear apodizations, with opposite chirping signs, and whose period is varied for each scattering unit. A coupling efficiency of −0.8  dB at 1550 nm is experimentally demonstrated, which represents the highes… Show more

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Cited by 8 publications
(3 citation statements)
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“…Due to the fully etched grating design, the devices can be fabricated using one or two lithographic masks, making misalignment less of an issue. Designs requiring 3 lithographic processes are more affected by misalignment issues, a study about its impact must then be conducted [29].…”
Section: Final Discussionmentioning
confidence: 99%
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“…Due to the fully etched grating design, the devices can be fabricated using one or two lithographic masks, making misalignment less of an issue. Designs requiring 3 lithographic processes are more affected by misalignment issues, a study about its impact must then be conducted [29].…”
Section: Final Discussionmentioning
confidence: 99%
“…To simplify the etching process, we designed a fully etched grating coupler (i.e. the silicon layer is etched down to the substrate) in alternative to the more common partially etched designs, requiring two lithographic masks [25], [26] or even more [27]- [29].…”
Section: Light Coupler Designmentioning
confidence: 99%
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