High-efficiency fixed abrasive polishing method for quartz crystal blanks

Jeong, Hee-Won; Aoki, Tetsuya; Hatsuzawa, Takeshi

doi:10.1016/j.ijmachtools.2003.10.012

Cited by 22 publications

(3 citation statements)

References 1 publication

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“…The machining parameters of the fixed abrasive method are also discussed. As a result, it has been confirmed that the fixed abrasive method has possibilities of accurate transferring, shortening process time, and realizing a dustless and clean working environment [4,10].…”

Section: Introductionmentioning

confidence: 87%

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Frequency responses of spherically contoured rectangular AT-cut quartz crystal resonators fabricated by fixed abrasive method

Jeong

Aoki²,

Hatsuzawa

2004

International Journal of Machine Tools and Manufacture

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Section: Introductionmentioning

confidence: 87%

“…[1,2] Recently, along with the popularization of small telecommunication equipment such as mobile phones, the use of rectangular shaped resonators has become mainstream, because they are preferable for mass production and miniaturization [3,4].…”

Section: Introductionmentioning

confidence: 99%

Frequency responses of spherically contoured rectangular AT-cut quartz crystal resonators fabricated by fixed abrasive method

Jeong

Aoki²,

Hatsuzawa

2004

International Journal of Machine Tools and Manufacture

Self Cite

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“…Among them, fixed-abrasive lapping is widely used in optical machining because of its high utilization of particles, high material removal rate, environmental protection, and easy to control the sample surface quality, etc. [4]. FAL is a two-dimensional touch friction and has less dependence on the slurry and clearing is easy after FAL because of no abrasive.…”

Section: Introductionmentioning

confidence: 99%

Study on Subsurface Damage after Fixed-Abrasive Lapping with Different Particle Size

Gao

Zhu

et al. 2011

SSP

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Differential chemical etch method (DCEM) was employed to study the effect on the surface/subsurface damage depth of K9 glass lapped by different particle sizes of fixed diamond abrasives. The advantage of DCEM is that both the lapped and substrate samples are placed in the chemical etch at the same time to decrease or eliminate the effect of etching condition variation. K9 glasses are firstly fixed-abrasive lapped with 40, 28, 14 and 10μm diamond abrasives, respectively. Surface damages of K9 glass after FAL are measured by Microscopy. The results show that the corresponding subsurface damage (SSD) depths of K9 glass are 4.5, 3.4, 2.8 and 1.6μm when the fixed diamond abrasive particle size are 40, 28, 14 and 10μm.With the decreasing of diamond particle size, the SSD depth decreases obviously and surface quality of K9 glass is improved significantly.

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Investigation into a geometry-based model for surface roughness prediction in vibratory finishing processes

Uhlmann

Dethlefs

Eulitz

2014

Int J Adv Manuf Technol

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High-efficiency fixed abrasive polishing method for quartz crystal blanks

Cited by 22 publications

References 1 publication

Frequency responses of spherically contoured rectangular AT-cut quartz crystal resonators fabricated by fixed abrasive method

Frequency responses of spherically contoured rectangular AT-cut quartz crystal resonators fabricated by fixed abrasive method

Study on Subsurface Damage after Fixed-Abrasive Lapping with Different Particle Size

Investigation into a geometry-based model for surface roughness prediction in vibratory finishing processes

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