2004
DOI: 10.1109/lpt.2004.835626
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High-Density Matrix-Addressable AlInGaN-Based 368-nm Microarray Light-Emitting Diodes

Abstract: We report on the fabrication of ultraviolet (UV) microarray light-emitting diodes, toward applications including mask-free photolithographic exposure. Devices with 64 64 elements have been fabricated in matrix-addressed format, generating directed output powers of up to 1 W per 20-m-diameter element at less than 1.0-mA drive current. The resistance of each elemental device was found to depend strongly on the n-GaN stripe length. The center wavelength of the emission was measured to be 368 nm, which is very clo… Show more

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Cited by 60 publications
(32 citation statements)
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“…A green micro‐LED display with VGA (video graphics array) resolution was demonstrated in 2012 with pixel pitch of 15 μm . Prof M. D. Dawson's team reported their micro‐LED work in 2004 with resolution of 64 × 64 and pixel pitch of 30 μm . Then they reported individual addressable micro‐LED displays with Si CMOS drivers in 2009.…”
Section: Introductionmentioning
confidence: 99%
“…A green micro‐LED display with VGA (video graphics array) resolution was demonstrated in 2012 with pixel pitch of 15 μm . Prof M. D. Dawson's team reported their micro‐LED work in 2004 with resolution of 64 × 64 and pixel pitch of 30 μm . Then they reported individual addressable micro‐LED displays with Si CMOS drivers in 2009.…”
Section: Introductionmentioning
confidence: 99%
“…Specifically, these techniques can be applied to the deposition of a micro optical element such as micro lens 1 micro LED, 2 or micro sphere laser. 3,4 In micro manipulation, the adhesional force is dominant since it is proportional to the first power of the object size, 5,6 whereas the gravitational force is proportional to the third power.…”
Section: Introductionmentioning
confidence: 99%
“…Various techniques were developed to fabricate the micro-LED array. [4][5][6] However, efficient light extraction enhancement structures have not yet been implemented on the micro-LED. We reported previously 7,8) a micro-mirror array (MMA) that can be embedded in the GaN by epitaxial lateral overgrowth (ELOG) method.…”
Section: Introductionmentioning
confidence: 99%