1959
DOI: 10.1063/1.1716475
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High-Current Ion Source

Abstract: Highcurrent ion implanter using a microwave ion source Rev. Sci. Instrum. 54, 681 (1983); 10.1063/1.1137453 Microwave ion source for highcurrent implanter Rev. Sci. Instrum. 49, 940 (1978);

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Cited by 21 publications
(3 citation statements)
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“…Figure 9 shows the configuration of an ion source for plasma propulsion, based on the Galathea trap developed by Morozov and co-workers [26,27] and previously modelled in [28]. This source configuration shows some similarity to the Penning discharge configuration developed in the 1930s [29] and used in ion sources in the 1950s [30]. The plasma is created in an annular source chamber containing a complex magnetic field and then flows into an acceleration channel similar to a standard HET channel; we focus on the source chamber.…”
Section: Example Iii: Semi-galathea Sourcementioning
confidence: 99%
“…Figure 9 shows the configuration of an ion source for plasma propulsion, based on the Galathea trap developed by Morozov and co-workers [26,27] and previously modelled in [28]. This source configuration shows some similarity to the Penning discharge configuration developed in the 1930s [29] and used in ion sources in the 1950s [30]. The plasma is created in an annular source chamber containing a complex magnetic field and then flows into an acceleration channel similar to a standard HET channel; we focus on the source chamber.…”
Section: Example Iii: Semi-galathea Sourcementioning
confidence: 99%
“…coldcathode or Penning gauge) and was later adapted to also function as an ion source (Penning 1937). PIG ion sources have been used for a variety of applications, such as sputtering and evaporation of surfaces, electromagnetic separation of isotopes and fusion applications (Barnett et al 1953, Meyerand and Brown 1959, Roth 1995, Loeb 2005. Another possible application is in a sealed-tube neutron generator (Nargolwalla and Przybylowicz 1973).…”
Section: Introductionmentioning
confidence: 99%
“…For the strongfied approach of equation (9) is within about 10 percent of the corresponding Maxwelliandistribution approach. Thus equation (9) for aL is sufficiently accurate to use in the plasma potential difference expression, equation (5). The variables of equation (9), though, a r e not suitable for a generalizing parameter based on overall measurements and readily available properties.…”
Section: --mentioning
confidence: 99%