1994
DOI: 10.1063/1.111730
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High critical current density NbN/AlN/NbN tunnel junctions fabricated on ambient temperature MgO substrates

Abstract: Articles you may be interested inHigh-quality epitaxial NbN/AlN/NbN tunnel junctions with a wide range of current density

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Cited by 63 publications
(30 citation statements)
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“…For all junctions, the junction quality is similar to that of the epitaxial NbN/AlN/NbN junctions fabricated on single-crystal MgO substrates. [6][7][8] These results suggest that our NbN/AlN/NbN junctions fabricated on the Si substrate with the TiN buffer layer are also epitaxial junctions. Figure 3 shows the current density J c values of the junctions with different thicknesses of the AlN barriers.…”
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confidence: 55%
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“…For all junctions, the junction quality is similar to that of the epitaxial NbN/AlN/NbN junctions fabricated on single-crystal MgO substrates. [6][7][8] These results suggest that our NbN/AlN/NbN junctions fabricated on the Si substrate with the TiN buffer layer are also epitaxial junctions. Figure 3 shows the current density J c values of the junctions with different thicknesses of the AlN barriers.…”
mentioning
confidence: 55%
“…1-5 Epitaxial NbN/AlN/NbN junctions fabricated on single-crystal MgO substrates have excellent junction quality, [6][7][8] and demonstrate good performance as superconducting electronics devices. [9][10][11][12] In most superconducting electronics applications, the junctions must be prepared on various substrates.…”
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confidence: 99%
“…NbN films can be epitaxially grown on MgO (100) single crystal substrates or MgO-buffered semiconductor wafers. 24,25 The crystal structure of NbN/Ni 60 Cu 40 /NbN trilayers were investigated by XRD. Figure 1 Fig.…”
Section: Layer © 2018 Author(s) All Article Content Except Where Omentioning
confidence: 99%
“…We have previously developed NbN tunnel junctions with epitaxially grown NbN films 14 and an aluminum nitride (AlN) barrier deposited by rf reactive sputtering on singlecrystal MgO (100) substrates. 15,16 Since both NbN and AlN have nitrogen in common, it is expected that clean electrodebarrier interfaces can be formed in NbN/AlN/NbN tunnel junctions with improved junction quality. In the previous work, however, we found that the crystal structures of the counter electrode NbN films were dependent on the thickness of the AlN barriers, resulting in different junction qualities depending on J c .…”
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confidence: 99%