High-coupling leaky SAWs on LiTaO<sub>3</sub> thin plate bonded to quartz substrate

Hayashi, Junki; Gomi, Masashi; Suzuki, Masashi; Kakio, Shoji; Suzaki, Haruka; Yonai, Toshifumi; Kishida, Kazuhito; Mizuno, Jun

doi:10.1109/ultsym.2017.8091675

Cited by 21 publications

(10 citation statements)

References 2 publications

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“…[27][28][29][30] Moreover, our group has recently reported an increase in K 2 , a reduction of attenuation, and a TCF of 0 ppm=°C in a leaky SAW and LLSAW on a piezoelectric thin plate bonded to a high-velocity substrate. 31,32) We expect that LLSAW devices with a three-layered structure consisting of ScAlN film=piezoelectric thin plate=high-velocity substrate will show better performance than LLSAW devices with a two-layered structure. Thus, we will investigate the characteristics of LLSAW propagation on the three-layered structure theoretically and experimentally.…”

Section: Discussionmentioning

confidence: 99%

Propagation characteristics of longitudinal-type leaky surface acoustic wave on layered structure consisting of Sc_xAl₁₋_xN film/LiNbO₃substrate

Suzuki¹,

Gomi²,

Kakio³

2018

Jpn. J. Appl. Phys.

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A longitudinal-type leaky surface acoustic wave (LLSAW) has a high phase velocity. Therefore, LLSAW devices are suitable for applications to high-frequency filters. However, the attenuation of LLSAWs is higher than that of other SAW modes. This higher attenuation of LLSAWs, which causes a low Q factor, can be reduced by growing a higher-velocity film on a piezoelectric substrate. On the other hand, K2 in the layered structure decreases because of the small piezoelectricity in high-velocity films. In this study, LLSAW propagation characteristics on a layered structure consisting of high-piezoelectric ScAlN film/X-cut 36°Y-propagation LiNbO3 were investigated. When a or ScAlN film was loaded, the reduction of the attenuation was observed, but K2 for this layered structure is lower than that of LiNbO3. On the other hand, K2 for Sc0.4Al0.6N film/LN is higher than that of LiNbO3.

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Section: Discussionmentioning

confidence: 99%

Propagation characteristics of longitudinal-type leaky surface acoustic wave on layered structure consisting of Sc_xAl₁₋_xN film/LiNbO₃substrate

Suzuki¹,

Gomi²,

Kakio³

2018

Jpn. J. Appl. Phys.

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“…As already mentioned Murata proposed configurations using Si as a support substrate (LT/SiO 2 /AlN/Si and LT/SiO 2 /Si), demonstrated spectacular performances (Q = 4,000 at 2 GHz, TCF = −8 ppm/K) [8], [17] and commercialized duplexers and multiplexers. Later, other configurations using different support substrates such as quartz [18], [19], [20], sapphire [20] and SiC [21] were proposed and demonstrated. In the literature, piezo on insulator (POI), guided SAW, layered SAW, thin film SAW or hetero acoustic layer (HAL) SAW are alternate denominations for IHP SAW technology.…”

Section: Guided Sawmentioning

confidence: 99%

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

et al. 2023

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This paper reviews the latest developments in microwave acoustic wave devices. After an introduction and brief history of bulk acoustic wave (BAW) and surface acoustic wave (SAW) devices, a review is given for guided SAWs and XBARs -two new technologies, which are promising for future 5G applications. Following this, we discuss recent simulation techniques, such as 3D finite element method (3D FEM) and simulation of nonlinearities, as well as filter synthesis. Next, a review on tunable and reconfigurable acoustics is given. Finally, we present the latest developments in microwave acoustics for millimeter-wave (mm-wave) operation as well as BAW oscillators.INDEX TERMS Bulk acoustic wave (BAW) devices, filter, filter-synthesis, front-end, high power, MTT 70th Anniversary Special Issue, multiplexer, nonlinearity, resonator, surface acoustic wave (SAW) devices.

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“…Figures 7 and 8 30) show the measured admittance properties of the bonded structure and single LT substrate for the LSAW and LLSAW, respectively. Figures 7(a)-7(c) show the results for the single 36°YX-LT, 36°YX-LT=AT0°X-quartz, and 36°YX-LT=AT90°X-quartz, respectively.…”

Section: Resonance Characteristicsmentioning

confidence: 99%

High coupling and highly stable leaky surface acoustic waves on LiTaO₃ thin plate bonded to quartz substrate

Hayashi

Yamaya

Suzuki

et al. 2018

Jpn. J. Appl. Phys.

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The propagation properties and resonance characteristics of leaky surface acoustic waves (LSAWs) and longitudinal-type LSAWs (LLSAWs) on a LiTaO3 (LT) thin plate bonded to an AT-cut quartz substrate were investigated experimentally. For the LSAWs and LLSAWs, the bonded structures of 36°Y-cut X-propagating LT (36°YX-LT)/AT-cut 90°X-propagating quartz (AT90°X-quartz) and X-cut 31°Y-propagating LT (X31°Y-LT)/AT-cut 45°X-propagating quartz (AT45°X-quartz) were fabricated, respectively. For the LSAW on 36°YX-LT/AT90°X-quartz, the electromechanical coupling factor (K2) of 11.1% was obtained at an LT thin-plate thickness of 0.25 wavelength, whereas K2 for a single LT substrate was measured to be 5.7%. For the LLSAW on X31°Y-LT/AT45°X-quartz, K2 increased from 2.8% for the single LT substrate to 7.2% at an LT thin-plate thickness of 0.14 wavelength. Furthermore, K2 of approximately 12% and the temperature coefficient of frequency (TCF) of 0 ppm/°C were theoretically obtained simultaneously for the LSAW on 36°YX-LT/AT-cut 90°X-quartz at a certain thin-plate thickness.

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High-coupling leaky SAWs on LiTaO₃ thin plate bonded to quartz substrate

Cited by 21 publications

References 2 publications

Propagation characteristics of longitudinal-type leaky surface acoustic wave on layered structure consisting of Sc_xAl₁₋_xN film/LiNbO₃substrate

Propagation characteristics of longitudinal-type leaky surface acoustic wave on layered structure consisting of Sc_xAl₁₋_xN film/LiNbO₃substrate

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

High coupling and highly stable leaky surface acoustic waves on LiTaO₃ thin plate bonded to quartz substrate

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High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate

Cited by 21 publications

References 2 publications

Propagation characteristics of longitudinal-type leaky surface acoustic wave on layered structure consisting of ScxAl1−xN film/LiNbO3substrate

Propagation characteristics of longitudinal-type leaky surface acoustic wave on layered structure consisting of ScxAl1−xN film/LiNbO3substrate

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

High coupling and highly stable leaky surface acoustic waves on LiTaO3 thin plate bonded to quartz substrate

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High-coupling leaky SAWs on LiTaO₃ thin plate bonded to quartz substrate

Propagation characteristics of longitudinal-type leaky surface acoustic wave on layered structure consisting of Sc_xAl₁₋_xN film/LiNbO₃substrate

Propagation characteristics of longitudinal-type leaky surface acoustic wave on layered structure consisting of Sc_xAl₁₋_xN film/LiNbO₃substrate

High coupling and highly stable leaky surface acoustic waves on LiTaO₃ thin plate bonded to quartz substrate