High conductivity micro-wires in diamond following arbitrary paths

Sun, Bangshan; Salter, Patrick S.; Booth, Martin J.

doi:10.1063/1.4902998

Cited by 73 publications

(55 citation statements)

References 27 publications

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“…Indeed, due to the lower density of the sp 2 phase, compared to that of sp 3 , a strong localized stress field is generated within the surrounding pristine diamond, which we show here can act as an optical waveguide. Drawing on previous work demonstrating that a combination of high NA focusing and adaptive optics aberration correction is essential for accurate fabrication of graphitic tracks in diamond 31 , we are able to generate Type III depressed cladding waveguides supporting both polarization states and 3D networks of Type II waveguides. …”

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“…The structural modification generated, as identified through Raman microspectroscopy is revealed as graphitic and amorphous sp 2 bonded carbon intermixed with sp 3 bonded diamond 26,27 , while it has recently been shown that, in addition, the NV concentration may be enhanced in nearby regions 28 . When the laser focus is traced through the diamond, a continuous damage track is created which is electrically conductive 29,31 , and has been successfully used for a range of radiation detectors [32][33][34] . Transmission electron microscopy and electron energy loss spectroscopy has been used to study thin slices of the laser-modified area, showing the presence of sub-micrometer patches of sp 2 bonded amorphous carbon, in addition to multiple dislocations of the diamond lattice 30 .…”

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Inscription of 3D waveguides in diamond using an ultrafast laser

Courvoisier

Booth

Salter

2016

Applied Physics Letters

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Three dimensional waveguides within the bulk of diamond are manufactured using ultrafast laser fabrication. High intensities within the focal volume of the laser cause breakdown of the diamond into a graphitic phase leading to a stress induced refractive index change in neighboring regions. Type II waveguiding is thus enabled between two adjacent graphitic tracks, but supporting just a single polarization state. We show that adaptive aberration correction during the laser processing allows the controlled fabrication of more complex structures beneath the surface of the diamond which can be used for 3D waveguide splitters and Type III waveguides which support both polarizations.Diamond has long found use as a material with extreme mechanical properties, and is now rapidly gaining interest for photonic applications 1 . High transmission over a very large spectral window and a high refractive index are attractive for light manipulation. Diamond also acts as a stable basis for a host of color centers which are promising for quantum enhanced technologies 2,3 . The nitrogen vacancy (NV) center is proving particularly useful not just for quantum processing 4 but, also for a range of sensors with extreme sensitivity to magnetic field and temperature 5-7 . The strong Raman coefficient is effective for Raman lasers generating low cost lasing solutions at unusual wavelengths 8,9 . The high Raman coefficient is also useful for implementing solid state quantum memories, a vital component for any quantum optical technology enabling the storage and retrieval of quantum information 10 . In addition, diamond serves as an ideal platform for biophotonics due to a high level of biocompatibility 11 . The efficiency of many of these technologies would be improved by the ability to confine and route light using a network of optical waveguides 12 .Previous demonstrations of waveguiding within diamond have been based upon the principle of selectively removing regions of diamond to generate an air-diamond interface.Surface RIB waveguides have previously been fabricated using reactive ion etching (RIE) with photolithographic patterning 13,14 . Elegant nanobeam waveguides have recently been demonstrated through either angled 15 or undercut RIE etching 16 . Alternatively, direct ion microbeam writing has been used to create shallow subsurface multimode waveguides 17 . All of these approaches are constrained to the diamond surface, require extensive material processing to the potential detriment of the diamond and are difficult to interface with optical fibers. However, a different method for generating guiding structures in crystals has emerged over the past decade, whereby an ultrashort pulsed laser is used to modify the material 18 . In the majority of implementations, light is confined in regions of stress neighboring laser induced damage tracks, which is designated as waveguide based upon a Type II modification 19 . Previously this has been successfully applied to a range of crystals such as lithium niobate 20,21 , KDP 22 , KTP 23 and T...

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Inscription of 3D waveguides in diamond using an ultrafast laser

Courvoisier

Booth

Salter

2016

Applied Physics Letters

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“…However, previous Raman studies revealed only the partial formation of sp 2 bonded graphite within the laser irradiated zones. 14,19,23,24 When using such modifications to create wires, the resultant resistivity varies from 0.02 to 2 X cm, [18][19][20]25,26 with values at least an order of magnitude higher than that for polycrystalline graphite. 27 Similarly, when writing optical waveguides using the stress field generated by modifications in Regime (ii), the propagation losses are significantly lower than those expected from a complete conversion of the irradiated zones to graphite.…”

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“…25 Wires were thus fabricated, and the sample was annealed at 900 C in a nitrogen atmosphere for one hour.…”

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“…The pulse energy has to be low to avoid any surface damage and a high degree of axial confinement is necessary for the subsequent processing, precluding the use of an axial multi-scan fabrication technique to improve the wire conductivity. 20,25 Cross-sections of wires were extracted by using standard "lift-out" protocols (e.g., see Ref. 29) on an FEI Nova DualBeam Focused Ion Beam (FIB) microscope.…”

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High resolution structural characterisation of laser-induced defect clusters inside diamond

Salter

Booth

Courvoisier

et al. 2017

Applied Physics Letters

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Laser writing with ultrashort pulses provides a potential route for the manufacture of three-dimensional wires, waveguides, and defects within diamond. We present a transmission electron microscopy study of the intrinsic structure of the laser modifications and reveal a complex distribution of defects. Electron energy loss spectroscopy indicates that the majority of the irradiated region remains as sp3 bonded diamond. Electrically conductive paths are attributed to the formation of multiple nano-scale, sp2-bonded graphitic wires and a network of strain-relieving micro-cracks.

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Study of Electrode Fabrication in Diamond with a Femto‐Second Laser

Paz

Allegre

et al. 2019

Physica Status Solidi (a)

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Diamond is a radiation hard material, which makes it suitable for its use in high energy physics experiments as a particle detector. To further reduce the effects of radiation damage, diamond detectors can be fabricated by inscribing graphitic electrodes perpendicular to the surface-the so-called 3D detectors. This can be done via processing with a femtosecond laser. Herein, a systematic study of the cross section of the graphitic wires inscribed into diamond is shown as a function of laser pulse energy, stage translational speed and, for the first time, polarization for a single crystal and polycrystalline chemical vapour deposition (CVD) diamond samples. No dependence of the electrode width with speed polarization and sample for the same pulse energies within uncertainties are observed. The graphitic content of the electrodes is studied in terms of Raman spectrometry: no clear dependence on the fabrication parameters studied is observed.

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High conductivity micro-wires in diamond following arbitrary paths

Cited by 73 publications

References 27 publications

Inscription of 3D waveguides in diamond using an ultrafast laser

Inscription of 3D waveguides in diamond using an ultrafast laser

High resolution structural characterisation of laser-induced defect clusters inside diamond

Study of Electrode Fabrication in Diamond with a Femto‐Second Laser

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