High-bandwidth open-loop motion control of a piezo-positioning mechanism based on a composite electromechanical dynamic model

Yang, Haigen; Zhu, Wei

doi:10.1088/1361-665x/aba81f

Cited by 2 publications

(2 citation statements)

References 23 publications

(30 reference statements)

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“…Many hysteresis models have been proposed in the literature. These include the Preisach model (Truong and Ahn, 2013;Tang and Li, 2015), the Prandtl-Ishlinskii (P-I) model (Liu et al, 2013;Yang and Zhu, 2020), the Bouc-Wen model (Ikhouane et al, 2007;, Maxwell's slip model (Quant et al, 2009), the LuGre model (Bashash and Jalili, 2008), and the polynomial model (Huang and Chiu, 2009). However, uncertainties due to parametric variations, hysteresis-compensated error, and unmodeled dynamics will lead to large control error.…”

Section: Introductionmentioning

confidence: 99%

Precision Compensation Control of a Piezo-Scanning Mechanism

Liu

Jiang²,

Huang³

et al. 2022

Front. Mater.

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In this study, a controller based on two compensators is developed to support a two-axis piezo-scanning mechanism for tracking control. The hysteresis compensator is designed based on a Prandtl–Ishlinskii hysteresis model in order to reduce the nonlinear hysteresis effect of a piezoelectric actuator. Furthermore, to compensate for uncertainties due to parametric variations, hysteresis-compensated error, and un-modeled dynamics, the uncertainties compensator based on the neural network disturbance observer is proposed. The developed controller is verified with regard to control performance by experiment. Those two observers are used to complete hysteresis compensation and disturbance compensation, which will not reduce the stability and bandwidth of the system and improve the control accuracy. Experimental results show that the proposed hybrid controller can overcome the mentioned nonlinearity and uncertainty efficiently and preserve good positioning accuracy with high-bandwidth varying frequencies (1–150 Hz).

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Section: Introductionmentioning

confidence: 99%

Precision Compensation Control of a Piezo-Scanning Mechanism

Liu

Jiang²,

Huang³

et al. 2022

Front. Mater.

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“…For the piezoelectric direct-drive actuator (PDDA), the stage is directly driven by the piezo-stack (piezoelectric stack) fixed to it. The PDDA can obtain a high resolution in the scale of nanometers, but its travel range is limited to several tens of millimeters [8][9][10][11][12]. For example, Wu and Xu proposed an XY positioning stage whose resolution and travel ranges were about 7 nm and 220 µm, respectively [8].…”

Section: Introductionmentioning

confidence: 99%

Study on improving the resolution of an H-shaped piezoelectric ultrasonic actuator by stick-slip principle

Tian

Chen

Liu

et al. 2021

Smart Mater. Struct.

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Improving the performance of the motion stages driven by piezoelectric actuators is an enduring topic for expanding their applications. For the motion stage with a travel range of tens of millimeters, trade-offs are inevitable between getting high speed (hundreds of millimeters per second) and high resolution (tens of nanometers), due to the inherent limitations of the operating principles of the piezoelectric actuators. In order to improve the output resolution of an H-shaped piezoelectric ultrasonic actuator, sawtooth excitation voltages are used in this work rather than the conventional sinusoidal voltages in previous works. The configuration and operating principle of the actuator are discussed in detail. The actuator consists of two vertical and two horizontal longitudinal transducers. The ends of the vertical transducers act as the driving tips and drive the stage forward with the alternating slow extensions and rapid contraction, during which stick motions and slip motions of the stage are acquired. An analytic model is developed to estimate the horizontal and vertical output displacement of the driving tip. The maximum error between the predicted value of the analytical model and the experimental value is about 14%. A prototype of the motion stage is fabricated and experiments are carried out to evaluate its output characteristics. The experiment results confirm the operating principle and show that the resolution is upgraded to tens of nanometers. The prototype obtains a resolution of 19 nm, a maximum speed of 2.22 μm s−1, and a maximum carrying load of 16.94 kg.

show abstract

High-bandwidth open-loop motion control of a piezo-positioning mechanism based on a composite electromechanical dynamic model

Cited by 2 publications

References 23 publications

Precision Compensation Control of a Piezo-Scanning Mechanism

Precision Compensation Control of a Piezo-Scanning Mechanism

Study on improving the resolution of an H-shaped piezoelectric ultrasonic actuator by stick-slip principle

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