2021
DOI: 10.1088/1361-665x/ac36b1
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Study on improving the resolution of an H-shaped piezoelectric ultrasonic actuator by stick-slip principle

Abstract: Improving the performance of the motion stages driven by piezoelectric actuators is an enduring topic for expanding their applications. For the motion stage with a travel range of tens of millimeters, trade-offs are inevitable between getting high speed (hundreds of millimeters per second) and high resolution (tens of nanometers), due to the inherent limitations of the operating principles of the piezoelectric actuators. In order to improve the output resolution of an H-shaped piezoelectric ultrasonic actuator… Show more

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Cited by 9 publications
(7 citation statements)
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“…Stepping piezoelectric actuators accumulate tiny displacements to achieve centimeter-level stroke [12]. Stepping piezoelectric actuators according to the principle of motion is divided into friction inertia piezoelectric actuators [12], inchworm piezoelectric actuators [13][14][15], ultrasonic piezoelectric actuators [16,17] and so on. Among them, the parasitic inertia type piezoelectric actuator in the friction inertia piezoelectric actuator can realize the precision displacement output of large stroke by using the simple structure, and its control strategy is also relatively simple, which has been widely concerned by researchers and scholars [18].…”
Section: Introductionmentioning
confidence: 99%
“…Stepping piezoelectric actuators accumulate tiny displacements to achieve centimeter-level stroke [12]. Stepping piezoelectric actuators according to the principle of motion is divided into friction inertia piezoelectric actuators [12], inchworm piezoelectric actuators [13][14][15], ultrasonic piezoelectric actuators [16,17] and so on. Among them, the parasitic inertia type piezoelectric actuator in the friction inertia piezoelectric actuator can realize the precision displacement output of large stroke by using the simple structure, and its control strategy is also relatively simple, which has been widely concerned by researchers and scholars [18].…”
Section: Introductionmentioning
confidence: 99%
“…Ultrasonic motors (USMs) utilise the inverse piezoelectric effect of piezoelectric materials to excite the micro-amplitude vibration of metallic elastomers in the ultrasonic frequency band and achieve the transformation of electrical energy to mechanical energy through the frictional interaction between stator and mover [1][2][3][4]. Owing to their advantages of high response speed, compact structure, immunity to electromagnetic interference, and precise positioning [5][6][7][8][9], the USMs are widely used in microrobots, aerospace devices, high accuracy positioning, biomedical technology, and semiconductor processing [10][11][12]. Based on the number of vibration modes, * Author to whom any correspondence should be addressed.…”
Section: Introductionmentioning
confidence: 99%
“…Piezoelectric actuators can be classified in many ways. From the perspective of excitation, piezoelectric actuators can be divided into single-phase excitation, dual-phase excitation and multi-phase excitation [7][8][9][10]. The conventional singlephase excitation type actuators usually utilize the combination of only one vibration mode and some special structures to achieve driving purposes.…”
Section: Introductionmentioning
confidence: 99%