2016
DOI: 10.1364/oe.24.020400
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High bandwidth on-chip capacitive tuning of microtoroid resonators

Abstract: We report on the design, fabrication and characterization of silica microtoroid based cavity opto-electromechanical systems (COEMS). Electrodes patterned onto the microtoroid resonators allow for rapid capacitive tuning of the optical whispering gallery mode resonances while maintaining their ultrahigh quality factor, enabling applications such as efficient radio to optical frequency conversion, optical routing and switching applications.

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Cited by 27 publications
(47 citation statements)
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“…(b) Cut-view through the dashed green line in (a), illustrating how contour Ω 1 can be continuously deformed and collapsed, while contour Ω 2 cannot and encloses therefore a real topological defect. (c) Singlespoked annular disk geometry[73], whose central hole is topologically identical to that enclosed by contour Ω 2 .Infigure 5(c), we show how this native geometric splitting[60] affects the third-sound mode splitting as a function of the circulation around the central hole. Each black dot represents a finite element simulation of the splitting between the high and low frequency eigenmodes shown infigure 5(b), as a function of the number of circulation quanta around the central defect.…”
mentioning
confidence: 93%
“…(b) Cut-view through the dashed green line in (a), illustrating how contour Ω 1 can be continuously deformed and collapsed, while contour Ω 2 cannot and encloses therefore a real topological defect. (c) Singlespoked annular disk geometry[73], whose central hole is topologically identical to that enclosed by contour Ω 2 .Infigure 5(c), we show how this native geometric splitting[60] affects the third-sound mode splitting as a function of the circulation around the central hole. Each black dot represents a finite element simulation of the splitting between the high and low frequency eigenmodes shown infigure 5(b), as a function of the number of circulation quanta around the central defect.…”
mentioning
confidence: 93%
“…The electro-optomechanical system used in this work consists of a microtoroidal optomechanical oscillator 36,37 with an integrated electrical interface that allows a radial force to be applied directly to the mechanical resonator. In a previous work, this force was used to demonstrate high-bandwidth tuning of the optical resonance frequency 38 . The optical mode is a whispering gallery mode (WGM) of the silica microtoroid of radius 100 µm, described by its ladder operators a and a † , with resonance frequency ω c /2π ≈ 194 THz and linewidth A circular slot is etched through the device to increase the compliance for radial motion 38 .…”
Section: Electro-optomechanical Systemmentioning
confidence: 99%
“…In a previous work, this force was used to demonstrate high-bandwidth tuning of the optical resonance frequency 38 . The optical mode is a whispering gallery mode (WGM) of the silica microtoroid of radius 100 µm, described by its ladder operators a and a † , with resonance frequency ω c /2π ≈ 194 THz and linewidth A circular slot is etched through the device to increase the compliance for radial motion 38 . Circular capacitor electrodes (yellow) are patterned on either side of the slot.…”
Section: Electro-optomechanical Systemmentioning
confidence: 99%
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“…This wavelength range can be useful for applications where all-optical devices are desirable, such as optical add/drop filters, atomic clocks, and optomechanics. [51,52] In addition, the sensitivity of the surface chemistry to a range of input powers is characterized. As part of this analysis, the Aazo group is cycled multiple times using the natural relaxation intrinsic to the Aazo molecule.…”
mentioning
confidence: 99%