1998
DOI: 10.1109/3516.712111
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High-bandwidth high-accuracy rotary microactuators for magnetic hard disk drive tracking servos

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Cited by 67 publications
(25 citation statements)
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“…There are several types of dual-stage system designs, which can be classified by the locations of micro actuators. The micro actuator can be placed at E-block [2], attached to slider [3], inserted next to the read/write head [4] or attached on the suspension [5]. In the suspension-based actuator design, it needs to modify the original suspension structure for the adhesion of two piezoelectric micro actuators.…”
Section: Introductionmentioning
confidence: 99%
“…There are several types of dual-stage system designs, which can be classified by the locations of micro actuators. The micro actuator can be placed at E-block [2], attached to slider [3], inserted next to the read/write head [4] or attached on the suspension [5]. In the suspension-based actuator design, it needs to modify the original suspension structure for the adhesion of two piezoelectric micro actuators.…”
Section: Introductionmentioning
confidence: 99%
“…Fan et al (1995) implemented a milli-actuator, which is a micro-actuator that operates at the slider level instead of at the suspension level. A more in-depth analysis of the milli-actuator proposed by Fan et al, was presented by Hirano et al (1998). Horsley et al (1999) used parallelplate capacitive electrodes to generate an electrostatic force, which was used to drive an actuator.…”
Section: Dual Stage Actuator Headmentioning
confidence: 99%
“…Muller's group (Tang, Nguyen and Howe, 1992), and the rotary electrostatic micro motor (Fan, Tai and Muller, 1989;Hirano and Fan, 1998 (Ahn, Ki and Allen, 1993;Guckel, 1998;Guckel and Christenson, 1993). Even though electromagnetic actuation employed in conventional motors or solenoids is the most successful principle used on a macro scale, MEMS magnetic devices are still relatively unestablished.…”
mentioning
confidence: 99%
“…This is due to the fact that 3D coils are difficult to fabricate by typical MEMS technologies. Successful commercial devices are magnetic read/write heads for computer disk drives (Hirano and Fan, 1998).…”
mentioning
confidence: 99%