2017
DOI: 10.1063/1.4997021
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Hexagonal to monoclinic phase transformation in Eu2O3 thin films grown on GaN (0001)

Abstract: The high-pressure hexagonal phase of Eu2O3 has been grown epitaxially on C-plane GaN (0001) by molecular beam epitaxy. A structural phase transition from the hexagonal to the monoclinic phase is observed with increasing film thickness by ex-situ X-ray diffraction. The critical thickness for the structural transition is between 2 and 6 nm. The observed epitaxial relationships between the substrate and the film are GaN (0001) ǁ Eu2O3 (0001), GaN ⟨112¯0⟩ ǁ Eu2O3 ⟨112¯0⟩ for the hexagonal phase, and GaN (0001) ǁ E… Show more

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Cited by 9 publications
(3 citation statements)
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“…[ 26 ] Clearly, the height of a single Eu 2 O 3 unit cell is about 0.36 nm along the b ‐axis. [ 27 ] With CVD methods, the rectangular Eu 2 O 3 flake with size ≈20 µm were obtained shown in Figure S2a (Supporting Information). The thickness of Eu 2 O 3 flakes can be as thin as ≈4.7 nm (Figure S2b, Supporting Information).…”
Section: Resultsmentioning
confidence: 99%
“…[ 26 ] Clearly, the height of a single Eu 2 O 3 unit cell is about 0.36 nm along the b ‐axis. [ 27 ] With CVD methods, the rectangular Eu 2 O 3 flake with size ≈20 µm were obtained shown in Figure S2a (Supporting Information). The thickness of Eu 2 O 3 flakes can be as thin as ≈4.7 nm (Figure S2b, Supporting Information).…”
Section: Resultsmentioning
confidence: 99%
“…The experiments were performed in two separate ultra-high vacuum (UHV) systems. The Eu 2 O 3 film was grown on GaN(0001)/p-Si(111) substrates at 800 o C by MBE; the growth, sample and UHV system details are described in [1,4].The Eu 2 O 3 film revealed a streaky reflection high-energy electron diffraction (RHEED) pattern after formation, as shown in Figure 1. The rotational symmetry of the pattern was 6-fold, the same as the underlying GaN susbstrate pattern.…”
Section: Methodsmentioning
confidence: 99%
“…For europium oxide three major forms exist: EuO, Eu 3 O 4 , and Eu 2 O 3 . The Eu atoms in the sesquioxide (Eu 2 O 3 ) have the highest possible oxidation state (+3), and therefore, during synthesis the stoichiometry of this form can be precisely achieved under oxygen-rich conditions [1]. Having a dielectric constant of about 14 [2] and a measured band gap of ~4.3-4.4 eV [3,4], Eu 2 O 3 is considered to be attractive as a high-K gate dielectric [5].…”
Section: Introductionmentioning
confidence: 99%