2018 IEEE International Electron Devices Meeting (IEDM) 2018
DOI: 10.1109/iedm.2018.8614601
|View full text |Cite
|
Sign up to set email alerts
|

Heterogeneously integrated ligtht sources on bulk-silicon platform

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

0
12
0

Year Published

2020
2020
2023
2023

Publication Types

Select...
4
1
1

Relationship

1
5

Authors

Journals

citations
Cited by 7 publications
(12 citation statements)
references
References 8 publications
0
12
0
Order By: Relevance
“…The pattern-dependent yield instability may imply that the flatness of the patterned silicon prior to the SPE process affects the bonding yield. Further process details can be found in the previous reports [33], [34], [37].…”
Section: B Process Of Iii/v-on-bs Platformmentioning
confidence: 99%
See 1 more Smart Citation
“…The pattern-dependent yield instability may imply that the flatness of the patterned silicon prior to the SPE process affects the bonding yield. Further process details can be found in the previous reports [33], [34], [37].…”
Section: B Process Of Iii/v-on-bs Platformmentioning
confidence: 99%
“…The III/V-on-Si PD is a reverse-biased optical amplifier with optimized length and width of the Si WG, and it features responsivity of 0.75 A/W and dark current of 150 nA at bias voltage of -1 V. Further analysis on the modulation bandwidth remains. Details of the III/V-on-BS devices can be found in the previous reports [33], [34]. The last missing key device for the library is the optical isolator, which allows the optical transmission in only one direction and prevents unwanted optical reflections [35].…”
Section: Performance Of Iii/v-on-bs Platformmentioning
confidence: 99%
“…From the technological perspective, silicon (Si) photonics emerged as an enabling technology for solid-state optical beam steering. This is because various Si-based photonics devices have recently become available for integration with the scalability and yields from the Si industry [2,[15][16][17][18][19][20]. This combination of market demand and enabling technologies triggered intense research efforts on Si-photonics-based optical beam steering.…”
Section: Introductionmentioning
confidence: 99%
“…Light intensity, which affects the reverse current of the diode, of the plasma can be simulated with the technique suggested in H. Shin's paper [2]. We used the fluorescent light tube to simulate the plasma light intensity on the probe station.…”
Section: Resultsmentioning
confidence: 99%
“…And protection diode has been purposed to use in avoiding plasma charging current [2]. But there has not been reported work done to find out the reliability and the limitation of the diode in the plasma ambient.…”
Section: Introductionmentioning
confidence: 99%