“…Previous works have been reported in which the crystallization temperature of amorphous-Si (a-Si) and a-Si 1Àx Ge x to polycrystal phase can be reduced by metal introduce crystallization (MIC) process using Ni and Al [5][6][7][8]. However, there is a concern that these metal atoms remaining in polycrystal layer become a contaminant acting as deep-level defects.…”