1988
DOI: 10.1364/ao.27.000124
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Heterodyne interferometry with a frequency-modulated laser diode

Abstract: A digital phase measuring interferometer with a frequency-modulated laser diode using the integratedbucket technique is described. The injection current is continuously changed to introduce a time- varying phase difference between the two beams of an unbalanced Twyman-Green interferometer. The intensity of the interference patterns is integrated with a CCD array sensor for intervals of one-quarter period of the fringe. Using the intensity data a microcomputer calculates the phase to be detected. Some experimen… Show more

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Cited by 42 publications
(14 citation statements)
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“…[3][4][5] When variable current i m (t) is injected into a LD, the intensity distribution of the interference pattern in a general two-beam interferometer can be expressed by…”
Section: Spm Interferometry Using Integrating-bucket Techniquementioning
confidence: 99%
See 1 more Smart Citation
“…[3][4][5] When variable current i m (t) is injected into a LD, the intensity distribution of the interference pattern in a general two-beam interferometer can be expressed by…”
Section: Spm Interferometry Using Integrating-bucket Techniquementioning
confidence: 99%
“…[1][2][3][4][5][6] Originally introduced in Ref. 1, the technique was used in our sinusoidal phasemodulating ͑SPM͒ 2 and SPM laser diode ͑LD͒ 3 interferometers.…”
Section: Introductionmentioning
confidence: 99%
“…Several types of interferometers that employ LDs have been proposed and used in practical applications. Although the LD wavelength is generally modulated directly using a stepwise [2,3], triangular [4,5], or sinusoidal signal [6,7], this direct modulation degrades the measurement accuracy because the intensity of the interference signal varies with the injection current. Figure 1 shows an example of the conventional direct modulation that uses a triangular signal as an injection current.…”
Section: Introductionmentioning
confidence: 99%
“…When the wavelength variation is large enough, for example some nanometers, wavemeters can be used for measurement. When the wavelength variation is relatively small (<0.1nm), the resolution of wavemeters is not adequate for the frequency change measurement, and therefore other instruments such as Fabry-Perot interferometer 6, 7 , Self-heterodyne interferometry [8][9][10][11] , and Michelson interferometer 12,13 are applied. In measurement using a Fabry-Perot etalon with known cavity space 6 , the transmitted power reach its maximum when the laser is tuned to the resonant condition of the etalon.…”
Section: Introductionmentioning
confidence: 99%
“…Michelson interferometer is simple with uncomplicated experimental setup 13 . However the accuracy is not high because the phase difference is obtained using estimation of interference orders.…”
Section: Introductionmentioning
confidence: 99%